Temperature self-compensating fiber grating micro force sensor and manufacturing method thereof

Abstract

The invention discloses a temperature self-compensating fiber grating micro force sensor and a manufacturing method thereof. The sensor comprises a force-bearing end cover, a sensor upper shell, a sensor lower shell, a hard core, a supporting cylinder and a round elastic diaphragm, wherein the hard core comprises a hard core screw and a hard core nut; the top part of the supporting cylinder passes through the sensor upper shell, and the bottom part is fixed with the hard core screw; the supporting cylinder is internally provided with a fiber, a first fiber grating and a second fiber grating are carved on the fiber, one end of the first fiber grating is fixedly connected with the top part of the upper shell and the other end is fixed with the hard core screw and is in a tensioning state, and one end of the second fiber grating is connected with the lower part of the hard core screw and the other end passes through the sensor lower shell and is in a free elastic state. The structure is simple; the force measurement sensitivity and the force measurement range of the sensor can be changed in a large range, production and manufacturing of batch sensors with multiple specifications are facilitated; temperature self compensating can be realized; and long-term and reliable effective monitoring by the sensor in a temperature-varying environment can be realized.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensing, in particular to a temperature self-compensating fiber grating micro force sensor and a preparation method thereof. Background technique [0002] In many engineering applications and scientific research occasions, it is necessary to accurately measure small changes in force, which has high requirements for the measurement accuracy and long-term reliability of the load cell. Accurate measurement of small forces in microhardness testing, etc. At present, the commonly used force sensors are electrical sensors, which can be mainly divided into resistance strain gauge force sensors and piezoelectric force sensors. In the field of micro force measurement, inductive force sensors and capacitive force sensors are mainly used. The above force or micro force sensors have the advantages of simple structure, high sensitivity, and wide measurement range, but they also have certain limitations, ...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to solve the problem of poor anti-electromagnetic interference ability, difficult on-site power supply, unsatisfactory long-term stability and reliability, and low measurement sensitivity and accuracy of the fiber grating force sensor in the prior art. It is difficult to realize the defect of accurate measurement of micro force, and provide a temperature self-compensating fiber grating micro force sensor and its preparation method to solve the problem of temperature and strain cross-sensitivity of fiber grating sensing elements at the same time, and realize long-term reliable monitoring of micro force in engineering practice

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