Fast evaluation method facing parallel batch processing machine dynamic scheduling

Abstract

The invention discloses a fast evaluation method facing parallel batch processing machine dynamic scheduling. Firstly, based on an idea of decomposing a large complex problem into a plurality of sub problems, a batch processing machine scheduling problem is decomposed, when the processing emergency degree of a work piece is determined according to a designed priority rule and a group batching period is completed, a symbiotic evolution algorithm based on a new encoding mechanism is used to iteratively search a scheme of distributing an upper layer batch work piece to a parallel machine, and the optimal processing sequence of each processing machine of a lower layer is determined at the same time. Secondly, a key scheduling performance characteristic value is extracted, an agent model with predictive ability is subjected to off-line training, a prediction estimation value is used to carry out fast evaluation of the scheduling performance of a lower layer sub problem, and an upper layer sub problem is guided to be optimized and adjusted continuously. Finally, combined with estimation evaluation and true re-assessment strategy, the agent model is upgraded in an online way, the precision of a prediction effect is maintained, and the purpose of synchronously optimizing machine allocation and batch work piece ranking in a reasonable time range is achieved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor production scheduling and control, and relates to a rapid evaluation method for dynamic scheduling of parallel batch processors in the process of semiconductor production lines. Background technique [0002] In recent years, due to the demand for product customization in the complex semiconductor manufacturing system market, it has shown the characteristics of multi-variety and small-batch production. Batch processors are commonly found in the diffusion and oxidation areas in the wafer manufacturing process. At the same time, due to the long time consumption of batch processing, they often become the bottleneck process that restricts the performance of the entire system. Therefore, effectively and quickly giving a scheduling decision-making scheme in actual production will improve system performance and expand production capacity. According to the idea of ​​decomposition, complex large-scal...

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Problems solved by technology

[0004] The following problems exist in using evolutionary algorithms to obtain optimal scheduling schemes for complex semiconductor manufacturing systems: (1) A large number of fitness value evaluations are required in the search process of evolutionary algorithms, and the problem of high computational cost often becomes the bottleneck that restricts the full search of evolutionary algorithms. Consider reducing the evaluation Complexity or reduce the number of evaluations

(2) Due to the coupling relationship between the sub-problems of hierarchical scheduling, direct nesting of evolutionary algorithms will cause time infeasibility

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