Fast evaluation method facing parallel batch processing machine dynamic scheduling

A batch scheduling and dynamic technology, applied in the direction of comprehensive factory control, comprehensive factory control, control/regulation system, etc., can solve the problems of reducing the number of evaluations, high computational cost, sufficient search, time infeasibility, etc.

Active Publication Date: 2017-03-22
BEIJING UNIV OF CHEM TECH
View PDF4 Cites 12 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The following problems exist in using evolutionary algorithms to obtain optimal scheduling schemes for complex semiconductor manufacturing systems: (1) A large number of fitness value evaluations are required in the search process of evolutionary algorithms, and the problem of high computational cost often beco

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Fast evaluation method facing parallel batch processing machine dynamic scheduling
  • Fast evaluation method facing parallel batch processing machine dynamic scheduling
  • Fast evaluation method facing parallel batch processing machine dynamic scheduling

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0045] The following content will describe the present invention in detail in conjunction with the accompanying drawings.

[0046] 1. Problem model parameter setting;

[0047] 1.1. Basic information attributes of the production line: workpiece type f; workpiece quantity n; equipment quantity m, and batch maximum capacity B.

[0048] 1.2. Workpiece dynamic feature attributes: workpiece arrival tightness control parameter η; workpiece processing time p, workpiece delay time d; workpiece weight w.

[0049] In the specific simulation experiment, the parameter settings are shown in the table below:

[0050]

[0051]

[0052] 2. Proxy model establishment and selection;

[0053] 2.1 According to the scale of the problem, we randomly sampled 400 sets of training data using the Latin square sampling method to build the model. After the training data is obtained, the data is evenly and randomly divided into 5 parts by cross-validation method, one of which is used as the test da...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a fast evaluation method facing parallel batch processing machine dynamic scheduling. Firstly, based on an idea of decomposing a large complex problem into a plurality of sub problems, a batch processing machine scheduling problem is decomposed, when the processing emergency degree of a work piece is determined according to a designed priority rule and a group batching period is completed, a symbiotic evolution algorithm based on a new encoding mechanism is used to iteratively search a scheme of distributing an upper layer batch work piece to a parallel machine, and the optimal processing sequence of each processing machine of a lower layer is determined at the same time. Secondly, a key scheduling performance characteristic value is extracted, an agent model with predictive ability is subjected to off-line training, a prediction estimation value is used to carry out fast evaluation of the scheduling performance of a lower layer sub problem, and an upper layer sub problem is guided to be optimized and adjusted continuously. Finally, combined with estimation evaluation and true re-assessment strategy, the agent model is upgraded in an online way, the precision of a prediction effect is maintained, and the purpose of synchronously optimizing machine allocation and batch work piece ranking in a reasonable time range is achieved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor production scheduling and control, and relates to a rapid evaluation method for dynamic scheduling of parallel batch processors in the process of semiconductor production lines. Background technique [0002] In recent years, due to the demand for product customization in the complex semiconductor manufacturing system market, it has shown the characteristics of multi-variety and small-batch production. Batch processors are commonly found in the diffusion and oxidation areas in the wafer manufacturing process. At the same time, due to the long time consumption of batch processing, they often become the bottleneck process that restricts the performance of the entire system. Therefore, effectively and quickly giving a scheduling decision-making scheme in actual production will improve system performance and expand production capacity. According to the idea of ​​decomposition, complex large-scal...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G05B19/418
CPCG05B19/41865G05B2219/32252Y02P90/02
Inventor 曹政才张嘉琦黄冉周传广赵婷婷
Owner BEIJING UNIV OF CHEM TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products