Infrared detector structure and preparation method thereof
An infrared detector and infrared reflection technology, which is applied in the field of infrared detectors, can solve the problems of sensitive resistance processing technology and increased detection unit inhomogeneity, achieve optimal noise, reduce detector structure and electrical performance inhomogeneity , The effect of simplifying the process
Inactive Publication Date: 2017-05-03
SHANGHAI JUGE ELECTRONICS TECH
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Problems solved by technology
In addition, in the case of a planar array of detection units, the tip structure makes the resistance value processing technology of the detection unit very sensitive, which increases the inhomogeneity between the detection units in the array
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[0046] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0047] figure 2 A perspective view showing the structure of an infrared detector according to an embodiment of the present invention, image 3 show with figure 2 The structural top view of the infrared detector structure corresponding to the three-dimensional schematic diagram of the infrared detector structure shown, wherein the infrared detector structure includes: a substrate 5, a main body bridge deck, an infrared reflective film 7, and: a thermal insulation beam 2 for Supporting the main body bridge deck suspended above the substrate 5, so that the main body bridge deck is separated from the substrate 5; the connecting column 1 is used to connect the substrate 5 and the heat insulating beam 2; wherein , the substrate 5 has an infrared reflective film 7 on the end face towards the main body bridge, and the main body bridge includes an electrode film p...
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The invention aims to provide an infrared detector structure and a preparation method thereof. Specifically, the infrared detector structure comprises a substrate, a main body bridge floor, a heat-insulating beam and a connecting column, wherein the heat-insulating beam is used for supporting the main body bridge floor to suspend above the substrate, thereby enabling the main body bridge floor to be separated from the substrate; the connecting column is used for connecting the substrate and the heat-insulating beam; the end face, which faces towards the main body bridge floor, of the substrate is provided with an infrared reflection film, the main body bridge floor comprises an electrode film pattern and a thermosensitive film pattern, the electrode film pattern comprises a positive electrode pattern and a negative electrode pattern which are formed by a comb tooth-shaped pattern respectively, comb teeth of the positive electrode pattern and comb teeth of the negative electrode pattern are arranged in a staggered manner, a strip-shaped zigzag region is formed between the positive electrode pattern and the negative electrode pattern, the strip-shaped region comprises a thermosensitive film region and through hole regions, and the through hole regions are located at bending parts of the strip-shaped region and divide the thermosensitive film region into a plurality of independent rectangular regions. Compared with the prior art, the infrared detector structure solves defects of nonuniform current and point discharge of staggered configuration of electrodes.
Description
technical field [0001] The invention relates to the technical field of infrared detectors, in particular to the technology of an infrared detector structure and a preparation method thereof. Background technique [0002] The uncooled infrared detector has been widely used in the field of infrared thermal imaging. By absorbing infrared radiation, it causes the temperature change of the thermal sensitive film of the detector. The temperature change causes the resistance of the thermal sensitive film to change, and the change of resistance is converted into output through the readout circuit Signal. [0003] A typical uncooled infrared detector includes a connecting post, an insulating beam, an infrared absorber, a readout electrode composed of an electrode film, and a thermistor composed of a part or all of the heat-sensitive film. The electrode film consists of two parts, positive and negative electrodes. One end of each part is electrically connected to the readout circuit ...
Claims
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IPC IPC(8): H01L31/09H01L31/0224H01L31/20G01J5/20
CPCG01J5/20H01L31/0224H01L31/09H01L31/20Y02P70/50
Inventor 陈学枝黄新龙沈憧棐
Owner SHANGHAI JUGE ELECTRONICS TECH