Large diameter mirror surface profile in-place detecting method and device

Abstract

The invention provides a large diameter mirror surface profile in-place detecting method and device. The detecting system is composed of a robot, a laser tracker mainframe, a mirror to be detected, a supporting tooling thereof, a mirror reference positioning device, a target ball and a robot interface device. The robot interface device comprises a magnetic seat, a flexible force sensor and a robot interface. The mirror to be detected is placed on the supporting tooling of the mirror. The target ball can contact the mirror to be detected, and is magnetically absorbed on the magnetic seat. The robot can drive the target ball to carry out dotting and scanning on the machining face of the mirror to be detected according to a pre-planned path to realize the surface profile scanning of the mirror to be detected until the scanning path covers the machining face of the whole mirror to be detected. Through data processing, the surface profile distribution of the machining face of the whole mirror to be detected is acquired. According to the invention, the detection state of the detected mirror is consistent with the machining state, and the method and device are particularly suitable for large diameter mirror milling and on-line surface profile detection of a grinding stage.

Description

technical field [0001] The invention relates to a measurement method and device in the field of optical processing detection, in particular to a method and device for detecting the surface profile of a large-diameter reflector in the milling and grinding stages. Background technique [0002] With the development of science and technology, large-aperture aspheric mirrors have become more and more widely used in astronomy, space optics and military fields, and the requirements for the efficiency and quality of optical processing are getting higher and higher, which poses new challenges. [0003] For the surface shape measurement in the milling and grinding stages of large-diameter mirrors, knife-edge instruments and three-coordinate measuring machines are generally used in China for measurement. Among them, the knife-edge instrument measures aspheric surfaces firstly by polishing the surface of the mirror in the grinding stage, and then using It is time-consuming and labor-int...

AI Technical Summary

Problems solved by technology

[0003] For the surface shape measurement in the milling and grinding stages of large-diameter mirrors, knife-edge instruments and three-coordinate measuring machines are generally used in China for measurement. Among them, the knife-edge instrument measures aspheric surfaces firstly by polishing the surface of the mirror in the grinding stage, and then using It is time-consuming and labor-intensive to measure the corresponding test optical path, and cannot be quantified, and can only be judged by the experience of craftsmen; using a three-coordinate measuring machine for aspheric surface profile detection can obtain higher surface shape measurement accuracy, but requires Frequent lifting and installation between the processing station and the testing station is inefficient and risky

Therefore, it is urgent to adopt a high-precision in-situ surface profile detection system to solve the problems of high precision, high efficiency, and high risk in the contour measurement of large-diameter mirror blanks, milling, and grinding.

Images