A large-area atmospheric pressure plasma jet generating device
A plasma and generating device technology, applied in the direction of plasma, electrical components, etc., can solve the problems of inability to ensure uniform discharge, uneven coverage of jet flow, unstable array, etc., and achieve simple structure, easy efficiency, and good stability Effect
Active Publication Date: 2019-06-14
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology
Traditional atmospheric pressure plasma jets are small in size and are only suitable for small-scale local treatment of material surfaces, which cannot meet the needs of industries and research fields
To form a large-area plasma jet, only arrayed atmospheric pressure plasma jets can be used, but there are gaps between the jets in the device with this structure, and the jets cannot evenly cover the surface of the object to be processed
On the other hand, each jet in the array is formed independently, which cannot guarantee the uniformity of the discharge; the mutual influence between the jets can also lead to the instability of the array
Method used
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Embodiment 2
[0018] Embodiment 2, on the basis of embodiment 1, do further limitation:
[0019] The outer dielectric tube 1 is quartz, with an inner diameter of 16 mm and an outer diameter of 20 mm; the inner dielectric tube 2 is glass, with an inner diameter of 12 mm and an outer diameter of 14 mm; the two form an annular gap with a width of 1.5 mm.
[0020] High-purity helium with a volume fraction of 99.999% flows through the annular space at a fixed flow rate of 1.4 slm, that is, liters per minute under standard conditions (0° C., 1 atm). The high-voltage electrode 3 is connected to the high-voltage power supply through a 2kΩ resistor, and the ground electrode 4 is grounded through a 1kΩ resistor; both electrodes are sheet-shaped aluminum foils with a width of 3mm and 1mm respectively; the distance between the two electrodes is 10mm.
[0021] When the frequency of the high-voltage AC power applied to the high-voltage electrode 3 is 5kHz and the voltage amplitude is 10kV, uniform plasma...
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The invention belongs to the technical field of plasma generation and application, and particularly relates to a large-area glow discharge atmospheric pressure plasma jet generation device. According to the technical scheme, the large-area atmospheric pressure plasma jet generation device comprises an external medium tube, an internal medium, a high voltage electrode and a grounding electrode. The internal medium is coaxially nested in the external medium tube, and an annular space is formed by the distance between the internal medium and the external medium tube. Working gas flows through the annular space. The high voltage electrode and the grounding electrode have an annular structure and are arranged at the internal side or the external side of the external medium tube. A power supply is connected by using the high voltage electrode, uniform plasmas are generated in the annular space when the power voltage is sufficiently high, and a large-area glow discharge plasma jet is formed on the grounding electrode. Uniform glow discharge is generated in the air of atmospheric pressure by using the internal and external medium tubes so that a novel annular plasma jet is formed, and the large-area plasma jet is generated by using the long grounding electrode.
Description
technical field [0001] The invention belongs to the technical field of plasma generation and application, and in particular relates to a large-area glow discharge atmospheric pressure plasma jet generation device. Background technique [0002] The plasma of the atmospheric pressure plasma jet is separated from the discharge area, which has the characteristics of easy operation, high safety and low cost. The traditional atmospheric pressure plasma jet has a small size and is only suitable for small-scale local treatment of the surface of materials, which cannot meet the needs of industries and research fields. To form a large-area plasma jet, only arrayed atmospheric pressure plasma jets can be used, but there are gaps between the jets in the device with this structure, and the jets cannot uniformly cover the surface of the object to be processed. On the other hand, each jet in the array is formed independently, which cannot guarantee the uniformity of the discharge; the mut...
Claims
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IPC IPC(8): H05H1/24
CPCH05H1/24
Inventor 欧阳吉庭朱平孟昭忠胡海欣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY