Method and device for removing nitrogen from special gas
A special gas and nitrogen technology, applied in the field of special gas purification, can solve the problems of excessive nitrogen content, affecting the purity of special gas, poor air tightness, etc., and achieve the effect of simple device, low cost and high efficiency purification
Inactive Publication Date: 2017-05-31
清远先导材料有限公司
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Problems solved by technology
[0002] During the process of filling special gases such as high-purity germane, high-purity arsine, and high-purity phosphine into cylinders, due to the poor airtightness of the filling system, the special gases are easily mixed with air, and most of the oxygen in the air and The reaction of special gas leaves a large amount of nitrogen impurities, and the special gas finally filled into the cylinder is prone to excessive nitrogen content. Based on this, the existing methods are to reintroduce the gas in the cylinder to the special gas purification system to re-experience Rectification and various molecular sieve adsorption. However, the purification system equipment is complicated and the purification process is complicated. Even after several purification systems, the nitrogen content in the special gas still does not decrease significantly, which will seriously affect the purity of the special gas and make the special gas economical. Greatly discounted value
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Embodiment 2
[0033] Method Example 2 is the same as Method Example 1 for most of the steps, except that S2: filling the gas cylinder with hydrogen with a purity greater than 6N until the gas pressure in the cylinder is 0.8 atmospheres.
Embodiment 3
[0035] Method Example 3 is the same as Method Example 1 for most of the steps, except that S2: filling the gas cylinder with hydrogen with a purity greater than 6N until the gas pressure in the cylinder is 1.2 atmospheres.
[0036] The principle of this method is: at the temperature of liquid nitrogen, the germane solidifies into a solid state, and although the nitrogen impurities in the gas cylinder are also cooled to the boiling temperature of liquid nitrogen, the vapor pressure is much lower than atmospheric pressure due to the low nitrogen content in the cylinder. , At the boiling temperature of liquid nitrogen, nitrogen cannot be liquefied, but always exists in the gas cylinder in a gaseous form, so it can be diluted with high-purity hydrogen and then evacuated and discharged.
[0037] The hydrogen in germane is generally not considered to be an impurity gas, and some customers also put forward customized requirements: hydrogen is mixed into high-purity germane in a certai...
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The invention relates to a method for removing nitrogen from special gas. The method is used for removing nitrogen impurities from the special gas. The method comprises the following steps of 1, cooling a special gas cylinder through liquid nitrogen till gas inside the gas cylinder is cooled to the boiling point of the liquid nitrogen; 2, introducing hydrogen with the purity being higher than 6N into the gas cylinder till the pressure intensity of the gas inside the gas cylinder equals to 0.8-1.2 times of the atmospheric pressure; 3, conducting vacuum extraction on the gas cylinder till the pressure intensity inside the gas cylinder reaches 100 millitorr or below; and 4, removing the liquid nitrogen, and leaving the gas cylinder standing still with the temperature rising, so that the special gas in the gas cylinder is gasified naturally. Meanwhile, the invention provides a device for removing the nitrogen from the special gas. By means of the method and device for removing the nitrogen from the special gas, the special gas is purified efficiently at the quite low cost through the simple device; the nitrogen which is not easy to remove is removed from the special gas; and quality of the special gas is not affected.
Description
technical field [0001] The invention relates to the field of special gas purification, in particular to a method and device for removing nitrogen from special gas. Background technique [0002] In the process of filling special gas such as high-purity germane, high-purity arsine, and high-purity phosphine into the gas cylinder, due to the poor airtightness of the filling system, air is easily mixed into the special gas, and most of the oxygen in the air is mixed with the gas. The special gas reaction leaves a large amount of nitrogen impurities, and the special gas that is finally filled into the gas cylinder is prone to exceed the nitrogen content. Based on this, the existing methods are to re-introduce the gas in the gas cylinder into the special gas purification system for re-experience. Rectification and adsorption of various molecular sieves, however, the purification system equipment is complicated and the purification process is complicated. Even through multiple puri...
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IPC IPC(8): F25J3/08
CPCF25J3/08F25J2205/20
Inventor 朱刘徐建其他发明人请求不公开姓名
Owner 清远先导材料有限公司