Online microwave phase detector with clamped beam and T-junction
A technology of phase detector and fixed support beam, which is applied to the phase angle between voltage and current, instruments, measuring devices, etc., can solve problems such as complex structures, and achieve the effect of easy integration, easy measurement, and online detection
Inactive Publication Date: 2017-05-31
SOUTHEAST UNIV
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Problems solved by technology
The existing phase detection methods are as follows: use diode detection, use multiplier structure and use vector algorithm to realize phase detection. The disadvantage of the above methods is that they all require relatively complicated structures
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[0014] The solid-supported beam T-junction online microwave phase detector of the present invention is fabricated on a high-resistance silicon substrate 1, and a layer of SiO is prepared on the high-resistance silicon substrate. 2 Layer 25, on SiO 2 The layer 25 is provided with a coplanar waveguide transmission line, a fixed beam structure, a T-junction, and an indirect thermoelectric microwave power sensor 1 and an indirect thermoelectric microwave power sensor 2 . As the signal transmission line of the phase detector of the present invention, the coplanar waveguide transmission line is used for the transmission of the microwave signal to be tested, including the signal line 2 and the ground line 3 of the coplanar waveguide transmission line. The anchored beam structure includes an anchored beam 4 , a first anchor area 5 and a second anchor area 6 . The fixed beam structure is suspended above the insulating medium layer 7 on the signal line 2 of the coplanar waveguide trans...
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An online microwave phase detector with clamped beam and T-junction is manufactured on a high-resistance silicon substrate and is composed of a coplanar waveguide transmission wire, a clamped beam structure, a T-junction, and two indirect thermoelectric microwave power sensors, wherein the coplanar waveguide transmission wire includes its signal wire and ground wire; the clamped beam structure comprises a clamped beam and an anchoring area and is suspended above a dielectric layer of a signal wire. The T-junction is composed of the signal wire and ground wire of the coplanar waveguide transmission wire and an air bridge; the indirect thermoelectric microwave power sensor includes a terminal resistor, a metal thermocouple arm, a semiconductor thermocouple arm, an ohmic contact area and a direct-current output block. The online microwave phase detector with clamped beam and T-junction is simple in structure, small in circuit size and capable of online detection of microwave phase.
Description
technical field [0001] The invention provides a solid-supported beam T-shaped junction on-line microwave phase detector, which belongs to the technical field of micro-electromechanical systems (MEMS). Background technique [0002] In the research of microwave technology, the microwave phase, which is one of the three parameters (amplitude, frequency and phase) to characterize the signal, is an important parameter of the microwave signal. As the frequency increases, the wavelength of the signal is gradually approaching the size of various components in the circuit. The voltage and current in the circuit exist in the form of waves. The phase delay of the signal makes the voltage and current at different positions in the circuit not only at the same time The amplitudes are different, and the voltage and current at the same location are also different at different times. Therefore, it is necessary to grasp and control the phase of the signal in the microwave frequency band, and...
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IPC IPC(8): G01R25/00
CPCG01R25/00
Inventor 廖小平严德洋
Owner SOUTHEAST UNIV