Self-adaptive inverse control method of piezoelectric driver

A piezoelectric driver and control method technology, applied in adaptive control, general control system, control/adjustment system, etc., can solve the problems of single application range, cannot eliminate model error, etc., and achieve the effect of improving output accuracy

Inactive Publication Date: 2017-06-06
NANJING UNIV OF SCI & TECH
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Problems solved by technology

Although this method can effectively reduce the influence of piezoelectric ceramic hysteresis characteristics, it cannot eliminate the model error caused by parameter changes in feedforward and inverse control. At the same time, different specifications and models of piezoelectric drivers require different invertors. Model controller with a single scope of application

Method used

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  • Self-adaptive inverse control method of piezoelectric driver
  • Self-adaptive inverse control method of piezoelectric driver
  • Self-adaptive inverse control method of piezoelectric driver

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Embodiment

[0049] to combine image 3 , Piezoelectric ceramics have nonlinear problems such as hysteresis and creep. The traditional method is to use high-precision sensors and PID controllers to achieve closed-loop control to achieve control purposes. However, this method assumes that the driver has a linear model, and the system has better dynamic characteristics through tuning parameters. In fact, due to the hysteresis characteristics of the driver, the above method can only be used to achieve the best control effect by setting the parameters for a certain point and certain conditions. When the control signal changes in a large range or the operating conditions change, the control performance will decline and it is difficult to set the parameters. .

[0050] The present invention uses the basic hysteresis model (PI) to analyze and model the hysteresis characteristics of the piezoelectric ceramics and calculates the inverse model. Based on the inverse model, the closed-loop control of...

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Abstract

The invention relates to a self-adaptive inverse control method of a piezoelectric driver. The method includes the following steps: establishing a non-linear mathematic model of output displacements and input voltages of a piezoelectric driver off-line according to a hysteretic non-linear relationship of the piezoelectric driver; according to the established non-linear mathematic model, calculating an inverse model of the piezoelectric driver and taking the inverse model as an initial inverse controller to drive the piezoelectric driver; calculating actual output displacements and input voltages of the piezoelectric driver when the piezoelectric driver is running on-line; identifying model parameters on-line through a self-adaptive algorithm, and obtaining a model during on-line running of the driver and calculating the inverse model of the driver; and according to the calculated parameters of the inverse model, replacing original parameters in a controller of the piezoelectric driver and updating the parameters on-line. The influence of parameter uncertainty of the model, unknown interference and other reasons is effectively overcome. Compared with a pure inverse model, the inverse model of the invention has the advantages that the control precision is greatly increased, and the inverse model is suitable for piezoelectric drivers with different models and different specifications.

Description

technical field [0001] The invention belongs to the field of automatic control, and in particular relates to an adaptive inverse control method of a piezoelectric driver. Background technique [0002] With the rise and development of nanotechnology, the cutting-edge technology in the new century, human beings have created an unprecedented new situation in understanding and transforming nature. It has brought major changes to many fields such as information technology, advanced manufacturing technology, medicine, energy, aerospace and defense. As one of the key technologies of nanotechnology, precision drive technology plays a pivotal role in the fields of microelectronics manufacturing, optoelectronics technology, aerospace technology, ultra-precision machining, biomedical engineering, and atomic force microscopy. Various industries around the world are gradually using microns and nanometers as precision standards. For example, in microlithography operations, the error of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B13/04
CPCG05B13/042
Inventor 陈远晟陈朝霞郭家豪罗丹应展烽张旭东徐冰董妍男
Owner NANJING UNIV OF SCI & TECH
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