Temperature and magnetic-field film sensor and data acquisition and analysis system thereof

Abstract

The present invention discloses a data acquisition and analysis system based on a temperature and magnetic-field film sensor. The system comprises a film sensor and a data acquisition and analysis module. The film sensor comprises a quartz substrate. The quartz substrate is plated with a manganese oxide film. The manganese oxide film is plated with a metal electrode I and a metal electrode II. The metal electrode I and the metal electrode II are connection with external wires through a bonding pad. A passivation protective layer is covered onto the manganese oxide film. The data acquisition and analysis module comprises a constant current source. The output end of the constant current source and the input end of a voltage amplifying circuit are connected with the film sensor through metal wires welded on the metal electrodes. A voltage signal of the film sensor is amplified by the voltage amplifying circuit. The voltage amplifying circuit is connected with a data acquisition unit. The voltage signal acquired by the data acquisition unit is transmitted to a computer. According to the technical scheme of the invention, the temperature and the magnetic field can be measured simultaneously or in the time-sharing manner. The film sensing material is selected, so that the sensor is smaller in size. The influence of the sensor on the test environment is reduced.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a temperature and magnetic field film sensor capable of simultaneously or time-divisionally measuring temperature and magnetic field size and a data acquisition and analysis system thereof. Background technique [0002] Traditional sensors have a single function and use. Usually, a sensor can only measure one type of external parameter. For example, a thermocouple temperature sensor can only measure the temperature in the environment, but not other types of environmental physical quantities. Tesla meters can only measure the magnitude of the magnetic field in the environment. With the development of detection technology, sensors with a single function are increasingly unable to meet the increasingly complex data acquisition tasks. On the other hand, the single function of a sensor also means high complexity and high cost of the system. The detection part of the traditional sensor is gene...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to overcome the shortcomings of traditional sensors such as single function, long response time and large volume, and provide a thin film sensor capable of testing temperature, magnetic field temperature and magnetic field and its data acquisition and analysis system

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