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Piezoelectric element, ultrasonic probe, ultrasonic measurement device, and manufacturing method of piezoelectric element

A piezoelectric element and measuring device technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, ultrasonic/sonic/infrasonic wave diagnosis, electrical components, etc., can solve the problem of unstable performance and different vibration characteristics of piezoelectric elements, etc. problem, achieve the effect of reducing performance instability and suppressing performance instability

Inactive Publication Date: 2017-06-09
SEIKO EPSON CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in the conventional manufacturing method of the piezoelectric element, the anisotropy is not paid much attention to, and a large number of elements are simply covered on a single crystal silicon wafer, patterned, and cut out to form a piezoelectric element.
In other words, even if the piezoelectric element is cut out from the same silicon wafer, the vibration characteristics of each piezoelectric element are different, and the performance of the piezoelectric element becomes unstable.

Method used

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  • Piezoelectric element, ultrasonic probe, ultrasonic measurement device, and manufacturing method of piezoelectric element
  • Piezoelectric element, ultrasonic probe, ultrasonic measurement device, and manufacturing method of piezoelectric element
  • Piezoelectric element, ultrasonic probe, ultrasonic measurement device, and manufacturing method of piezoelectric element

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no. 1 approach

[0041] figure 1 It is a diagram showing an example of the system configuration of the ultrasonic measurement device 10 according to the present embodiment.

[0042] The ultrasonic measurement device 10 is a device that measures biological information of the subject 2 by transmitting ultrasonic waves to the subject 2 and measuring reflected waves. In the present embodiment, blood vessel function information called IMT (Intima Media Thickness: Intima Media Thickness of a blood vessel) of the carotid artery 3 is measured as one type of biological information. Of course, in addition to IMT, other blood vessel function information or biological information may be measured such as blood vessel diameter, blood pressure estimated from blood vessel diameter, and pulse calculated from change in blood vessel diameter. Also, the object of measurement is not limited to humans.

[0043] The ultrasonic measurement device 10 has a measurement control device 20 and an adhesive-type ultrasoni...

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Abstract

A piezoelectric element, in which a piezoelectric body, and a vibrating plate having [111]-oriented single crystal silicon as a vibrating material are laminated is provided. In addition, a manufacturing method of a piezoelectric element including: cutting out a vibrating material to be used in the vibrating plate from a [111]-oriented single crystal silicon wafer; and laminating a piezoelectric body and the vibrating plate is provided.

Description

technical field [0001] The present invention relates to piezoelectric elements and the like. Background technique [0002] Using ultrasonic probes and ultrasonic measuring devices that use piezoelectric elements as transducers for transmitting and receiving ultrasonic waves, biological information is measured to evaluate vascular functions and diagnose vascular diseases. For example, Patent Document 1 discloses to automatically detect Ultrasonic probe and ultrasonic measuring device for blood vessel wall. [0003] A piezoelectric element used in such an ultrasonic probe and an ultrasonic measuring device is, for example, disclosed in Patent Document 2, in which a piezoelectric body is laminated on a vibrating plate on a thin film. [0004] It has been found that the Young's modulus and Poisson's ratio have anisotropy with respect to the plane orientation in a silicon single crystal wafer used in the production of a general piezoelectric element. However, in the convention...

Claims

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Application Information

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IPC IPC(8): H03H9/05A61B8/00
CPCA61B8/44A61B8/4444H03H9/05A61B8/0891B06B1/0629A61B8/4427A61B8/4494H10N30/2041H10N30/2042H10N30/07H10N30/706H10N30/20H10N30/30H10N30/072H10N30/088A61B8/14
Inventor 山崎清夏田村博明
Owner SEIKO EPSON CORP
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