Cluster ion beam nanometer processing equipment control device and control method thereof

Abstract

The invention provides a cluster ion beam nanometer processing equipment control device and a control method thereof. The cluster ion beam nanometer processing equipment control device comprises a system control board, a human-computer interaction module, a process control module, a data acquisition module, a nanometer processing control module and a material conveying module, and the human-computer interaction module, the process control module, the data acquisition module, the nanometer processing control module and the material conveying module are electrically connected to the system control board respectively. The invention further provides a control method of cluster ion beam nanometer processing equipment. The particle size of the nanocluster is detected in real time, and the material is unloaded when a set condition is met. According to the cluster ion beam nanometer processing equipment control device and the control method thereof, the consistency and the stability of the particle size of the nanocluster are achieved, the component deviation and the phase contamination are reduced to the greatest extent, and the dynamic response performance of a system is drastically improved.

Description

technical field [0001] The invention relates to the field of nanomaterial processing, in particular to a cluster ion beam nanoprocessing equipment control device and a control method thereof. Background technique [0002] Nanomaterials are also called ultrafine crystal materials. The particle size of their clusters is between 1nm and 100nm. They have unique and excellent physical properties such as small size effects, quantum effects, interface effects and surface effects. They are used in ceramics, microelectronics , chemical, medical and other fields have broad application prospects. In the past ten years, the preparation methods, performance tests and theoretical explanations of nanomaterials have become hot research issues in various countries, and fruitful theoretical and applied research results have been achieved. [0003] As far as the processing technology of nanomaterials is concerned, there are mainly preparation methods such as mechanical ball milling method, mo...

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Problems solved by technology

[0008] The purpose of the present invention is to provide a cluster ion beam nano-processing equipment control device and its control method, aiming to solve the problems of component deviation, phase pollution and inability to realize the performance of nano-clusters in the existing nano-processing technology. Problems such as poor measurement and dynamic response performance

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