The invention provides a cluster
ion beam nanometer
processing equipment control device and a control method thereof. The cluster
ion beam nanometer
processing equipment control device comprises a
system control board, a human-computer interaction module, a
process control module, a
data acquisition module, a nanometer
processing control module and a material conveying module, and the human-computer interaction module, the
process control module, the
data acquisition module, the nanometer processing control module and the material conveying module are electrically connected to the
system control board respectively. The invention further provides a control method of cluster
ion beam nanometer processing equipment. The particle size of the nanocluster is detected in real time, and the material is unloaded when a set condition is met. According to the cluster
ion beam nanometer processing equipment control device and the control method thereof, the consistency and the stability of the particle size of the nanocluster are achieved, the component deviation and the phase
contamination are reduced to the greatest extent, and the dynamic response performance of a
system is drastically improved.