Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Micro-single-shell resonator

A single shell and resonator technology, applied in the field of micro-electromechanical systems, can solve problems such as parasitic capacitance and signal interference, affecting device performance, and large electrode and electrode areas, so as to reduce thermoelastic loss, low thermomechanical noise, and effective high quality effect

Inactive Publication Date: 2017-06-13
SOUTHEAST UNIV
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In order to realize high-performance micro-shell resonant gyroscopes, the invention patent "Micro-glass hemispherical resonant gyroscope and its wafer-level preparation method" (patent application number: 201510963681.6) proposes an embedded silicon electrode, which is embedded in a composite structure substrate , but the area between the electrodes is large, and it is easy to generate large parasitic capacitance and signal interference during operation, which affects the performance of the device

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Micro-single-shell resonator
  • Micro-single-shell resonator
  • Micro-single-shell resonator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] A micro monocoque resonator 100, comprising:

[0036] Encapsulation case cover 30;

[0037] Micro monocoque resonator 20;

[0038] planar electrode 50;

[0039] a composite structural substrate 40 with a plurality of conductive vias 48;

[0040] Wherein, the micro-single shell resonator 20 is composed of a single shell 2 and a single-end column 4 located at the inner central axis of the single shell 2; the bottom of the single-end column 4 and the bottom of the edge 6 of the single shell 2 flush; the single-end column 4 is connected and led out through a conductive through-hole 48 in the composite structure substrate 40 through a layer of conductive adhesive layer 60; there is a planar electrode 50 on the composite structure substrate 40; the planar electrode 50 passes through The conductive vias 48 located below are drawn vertically; the conductive vias 48 are drawn out through the conductive lead-out layer 70 on the back of the composite structure substrate 40; the...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a micro-single-shell resonator. The resonator comprises a packaging shell cover, a micro-single-shell harmonic oscillator, plane electrodes, and a composite structure substrate with a plurality of conductive through holes; the micro-single-shell harmonic oscillator is composed of a single shell and a single-ended column located at the position of a central axis inside the single shell; the bottom of the single-ended column is flush with the edge bottom of the single shell; the bottom of the single-ended column is connected to a conductive through hole in the composite structure substrate and led out through the conductive through hole through a conductive adhesion layer; the composite structure substrate is provided with the plane electrodes and the plane electrodes are led out through the conductive through holes below the plane electrodes; the conductive through holes are led out through a conductive leading-out layer at the back side of the composite structure substrate; and the packaging shell cover and the composite structure substrate with the plurality of through holes are packaged to form a vacuum space and a gas-absorbing agent is placed therein. According to the invention, the micro-single-shell resonator is provided with the plane electrodes, and the parasitic capacitance between the electrodes is reduced substantially; and the plane electrodes are conductively led out through the conductive through holes from the back side of the composite structure substrate.

Description

technical field [0001] The invention relates to a micro-single shell resonator in the field of micro-electro-mechanical systems (MEMS). Background technique [0002] In order to realize high-performance micro-shell resonant gyroscopes, the invention patent "Micro-glass hemispherical resonant gyroscope and its wafer-level preparation method" (patent application number: 201510963681.6) proposes an embedded silicon electrode, which is embedded in a composite structure substrate , but the area between the electrodes is large, and it is easy to generate large parasitic capacitance and signal interference during operation, which affects the performance of the device. To solve this problem, it is necessary to reduce the area between electrodes to reduce parasitic capacitance and signal interference. Contents of the invention [0003] Aiming at the shortcomings of the above-mentioned prior art, the object of the present invention is to provide a micro single shell resonator, whic...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02H03H9/10H03H9/24B81B3/00
Inventor 尚金堂罗斌
Owner SOUTHEAST UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products