Micro-single-shell resonator

Abstract

The invention discloses a micro-single-shell resonator. The resonator comprises a packaging shell cover, a micro-single-shell harmonic oscillator, plane electrodes, and a composite structure substrate with a plurality of conductive through holes; the micro-single-shell harmonic oscillator is composed of a single shell and a single-ended column located at the position of a central axis inside the single shell; the bottom of the single-ended column is flush with the edge bottom of the single shell; the bottom of the single-ended column is connected to a conductive through hole in the composite structure substrate and led out through the conductive through hole through a conductive adhesion layer; the composite structure substrate is provided with the plane electrodes and the plane electrodes are led out through the conductive through holes below the plane electrodes; the conductive through holes are led out through a conductive leading-out layer at the back side of the composite structure substrate; and the packaging shell cover and the composite structure substrate with the plurality of through holes are packaged to form a vacuum space and a gas-absorbing agent is placed therein. According to the invention, the micro-single-shell resonator is provided with the plane electrodes, and the parasitic capacitance between the electrodes is reduced substantially; and the plane electrodes are conductively led out through the conductive through holes from the back side of the composite structure substrate.

Description

technical field [0001] The invention relates to a micro-single shell resonator in the field of micro-electro-mechanical systems (MEMS). Background technique [0002] In order to realize high-performance micro-shell resonant gyroscopes, the invention patent "Micro-glass hemispherical resonant gyroscope and its wafer-level preparation method" (patent application number: 201510963681.6) proposes an embedded silicon electrode, which is embedded in a composite structure substrate , but the area between the electrodes is large, and it is easy to generate large parasitic capacitance and signal interference during operation, which affects the performance of the device. To solve this problem, it is necessary to reduce the area between electrodes to reduce parasitic capacitance and signal interference. Contents of the invention [0003] Aiming at the shortcomings of the above-mentioned prior art, the object of the present invention is to provide a micro single shell resonator, whic...

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Problems solved by technology

[0002] In order to realize high-performance micro-shell resonant gyroscopes, the invention patent "Micro-glass hemispherical resonant gyroscope and its wafer-level preparation method" (patent application number: 201510963681.6) proposes an embedded silicon electrode, which is embedded in a composite structure substrate , but the area between the electrodes is large, and it is easy to generate large parasitic capacitance and signal interference during operation, which affects the performance of the device

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