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A fully coupled MEMS tuning fork gyroscope

ActiveCN117213459BImprove movement consistencyhigh sensitivityGyroscopeFully coupled
The application relates to a full-coupling MEMS tuning fork gyroscope, comprising: an anchor point structure, a suspension structure being suspended on the anchor point structure; wherein the suspension structure comprises two symmetrically arranged suspension units, each suspension unit comprising a driving mass, a Coriolis mass and a sensitive mass, the two sensitive masses being connected through a sensitive coupling structure between opposite surfaces of the two sensitive masses, and the free ends of the two driving masses being connected through a driving coupling structure. The MEMS tuning fork gyroscope designed by the application adopts a full-coupling structure, so that the response amplitudes of the driving mode and the sensitive mode of the gyroscope are closer, the frequency difference between the two modes is effectively reduced, and the sensitivity of the gyroscope is effectively enhanced.
Owner:NORTHWESTERN POLYTECHNICAL UNIV