Laser shock assisted dismounting method for micro electro-mechanical devices
A laser shock and electrical device technology, applied in laser welding equipment, welding equipment, metal processing equipment, etc., can solve the problems of difficult disassembly, scratches and damage to devices, and achieve the effect of avoiding contact scratches
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[0034] The details and working conditions of the specific device proposed by the present invention will be described in detail below in conjunction with the accompanying drawings.
[0035] The MEMS device I2 is attached to the MEMS carrier wafer 4 , and the MEMS device II3 is interference-connected with the MEMS device I2 to form the MEMS 1 .
[0036]Wash the surface of the MEMS device I2 and the MEMS device II3 with alcohol or acetone, pre-coat the absorbing layer 5 on the back of the MEMS device I2 and the MEMS device II3, the thickness of the absorbing layer 5 is 0.1-0.15 mm, and there is enough viscosity to make The MEMS 1 will not fall off from the surface of the metallic glass 6; the MEMS 1 is adhered to the surface of the high-strength metallic glass 6 by using the viscosity of the absorbing layer 5, and the metallic glass 6 serves as the carrier for the MEMS 1 and the constraints of the laser shock layer; the metallic glass 6 carrying the micro-electro-mechanical s...
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