Quartz tuning fork sensitive structure on-chip testing device and method

Abstract

The invention provides a quartz tuning fork sensitive structure on-chip testing device and method. The device provides a space for the vibration of a quartz tuning fork chip after electrification through employing a bulged testing position, and achieves the dual fixing of the quartz tuning fork chip through vacuum adsorption and a spring pressing rod. The quartz tuning fork chip is placed on the test position more stably, and the quartz tuning fork chip is fixed and does not move in a pressure applying and relieving process of a probe on the quartz tuning fork chip so that a probe head is prevented from being scratched by the contact with the test position of the quartz tuning fork chip; and through the cooperation of a vacuum adsorption module and a probe module, a processes of chip mounting, wire bonding, testing and the like in a quartz tuning fork gyroscope machining process are completely simulated, the machining quality of the quartz tuning fork chip can be accurately fed back, and subsequent further research on the parameter influence of the quartz tuning fork chip is facilitated. The device provided by the invention can automatically perform on-chip testing and judge whether the electrical performance quality of the quartz tuning fork chip is good or not, and realizes breakthrough of automatic on-chip testing of the quartz tuning fork chip.

Description

Technical field[0001]The present invention relates to the field of quartz tunnel sensitive structural testing, and more particularly to a quartz tunnel sensitive structure in a sheet testing apparatus and method.Background technique[0002]The sensitive structure portion of the quartz tunnel is quartz tunnel chip. The three-dimensional microstructure of the quartz tunnel chip is complex. The electrode distribution requires high, the current detection method is: quartz tunnel microstructure substrate processing is completed ->By microscope detection + visual initial determination structural electrode is intact->The qualified product after preliminary screening is broken from the substrate (referred to as a lobes) ->Patch the quartz tuncil chip from the splice and key line ->Whether the quartz tunnel chip has basic functions.[0003]Among them, the patch is to bond the quartz tunnel chip from the tube to TO (Transistor-Out-line, the key package) boss, such asFigure 1A As shown...

AI Technical Summary

Problems solved by technology

[0005] The invention provides a quartz tuning fork sensitive structure on-chip testing device and method, which can solve the technical problem of low detection efficiency of the existing method

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