Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Liquid material vaporization apparatus

A technology for liquid materials and gasification devices, which is applied in boiling devices, gaseous chemical plating, metal material coating processes, etc., and can solve the problems of difficulty in stably generating material gas and inability to stably gasify

Active Publication Date: 2017-06-30
HORIBA STEC CO LTD
View PDF5 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, liquid transport to the vaporizer and vaporization in the vaporizer cannot be performed stably, and as a result, there is a problem that it is difficult to stably generate material gas.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Liquid material vaporization apparatus
  • Liquid material vaporization apparatus
  • Liquid material vaporization apparatus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0034] One embodiment of the liquid material vaporization device of the present invention will be described below with reference to the drawings.

[0035] The liquid material vaporization device 100 of this embodiment is, for example, assembled in an optical fiber manufacturing device and used in an optical fiber manufacturing process. In addition, for example, it can be incorporated into a semiconductor manufacturing device and used in a semiconductor manufacturing process.

[0036] Specifically, as figure 1 As shown, the liquid material vaporization device 100 includes: a gas-liquid mixing part 2, which mixes the liquid material and a carrier gas as a gas to form a gas-liquid mixture; and a gasification part 3, which heats the gas-liquid mixture and utilizes The carrier gas guides out the material gas obtained by vaporizing the liquid material.

[0037] In addition, the liquid material is OMCTS (octamethylcyclotetrasiloxane, boiling point 175° C.), TEOS (tetraethoxysilane,...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
boiling pointaaaaaaaaaa
boiling pointaaaaaaaaaa
Login to View More

Abstract

In order to eliminate liquid accumulation occurring between a gas-liquid mixing part and a vaporization part to stably perform liquid feeding to the vaporization part and vaporization in the vaporization part, a liquid material vaporization apparatus includes: a gas-liquid mixing part (2) adapted to mix a liquid material and gas to produce a gas-liquid mixture; and a vaporization part (3) adapted to heat the gas-liquid mixture to vaporize the liquid material. In addition, the gas-liquid mixing part (2) has a gas-liquid mixture lead-out pipe (6) for leading out the gas-liquid mixture, the vaporization part (3) has a heating flow path HS for heating the gas-liquid mixture, and a lead-out port (6P) of the gas-liquid mixture lead-out pipe (6) is arranged in the heating flow path HS.

Description

technical field [0001] The invention relates to a liquid material gasification device. Background technique [0002] As shown in Patent Document 1, a conventional liquid material vaporization device is a device in which a liquid material and a carrier gas are mixed while controlling the flow rate in a gas-liquid mixing unit in a control valve equipped with a liquid flow rate control function. , and the gas-liquid mixture at this time is released from the nozzle part formed near the flow control part, and the liquid material is decompressed and vaporized. [0003] Patent Document 1: Japanese Patent Laid-Open Publication No. 2001-156055 [0004] Furthermore, since it is difficult to generate a large flow rate of material gas in the above-described liquid material vaporization device, it is conceivable to use it together with a vaporizer especially in a large flow rate application. [0005] However, since the flow channel expands just behind the nozzle portion of the gas-liqu...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/448B01F23/80
CPCC23C16/4481B01B1/00B01D1/02B01D1/14B01F23/806B01F23/811
Inventor 伊东丈智井上正规
Owner HORIBA STEC CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com