Automatic wafer conveying machine and method
A wafer, automatic technology, applied in the manufacture of conveyor objects, electrical components, semiconductor/solid-state devices, etc., can solve problems such as wafer breakage and damage, and achieve the effect of convenient handling
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[0045] refer to Figure 1 to Figure 10 , an automatic wafer transfer machine, the automatic wafer transfer machine includes a cassette module 1, a first robot arm module 2 for extracting and storing wafers, and a wafer on the first robot arm module for transferring To the second mechanical arm module 3 of the workbench, wherein:
[0046] The cassette module includes a working platform 4 for installing the cassette, a cassette lifting table transmission device 5 for lifting and lowering in the Z-axis direction, and a cassette module fixing frame 6. Optical fiber sensors 7 on both sides of the platform for scanning wafers in the cassette;
[0047] The first mechanical arm module includes a first mechanical arm fixing base 8 provided with a linear slide rail 27, a linear transmission device 9 on one side of the first mechanical arm fixing base, and a first mechanical arm 10 reciprocating on the linear sliding rail. , the end of the first robotic arm is provided with a "C"-shape...
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