Automatic wafer transfer machine and transfer method
A wafer, automatic technology, used in conveyor objects, electrical components, transportation and packaging, etc., can solve problems such as wafer breakage and damage, and achieve the effect of ensuring stability, ensuring stability, and stable use
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[0045] refer to Figure 1 to Figure 10 , an automatic wafer transfer machine, the automatic wafer transfer machine includes a cassette module 1, a first robot arm module 2 for extracting and storing wafers, and a wafer on the first robot arm module for transferring To the second mechanical arm module 3 of the workbench, wherein:
[0046] The cassette module includes a working platform 4 for installing the cassette, a cassette lifting table transmission device 5 for lifting and lowering in the Z-axis direction, and a cassette module fixing frame 6. Optical fiber sensors 7 on both sides of the platform for scanning wafers in the cassette;
[0047] The first mechanical arm module includes a first mechanical arm fixing base 8 provided with a linear slide rail 27, a linear transmission device 9 on one side of the first mechanical arm fixing base, and a first mechanical arm 10 reciprocating on the linear sliding rail. , the end of the first robotic arm is provided with a "C"-shape...
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