High-precision large-aperture grating five-degree-of-freedom splicing precision measurement method

A technology of large-diameter grating and measurement method, which is applied in the directions of measurement device, optical instrument test, machine/structural component test, etc. Improve the splicing accuracy and measure the effect of low coupling

Active Publication Date: 2017-07-07
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the problems of high coupling degree between degrees of freedom, cumbersome operation, and poor precision in existing grating splicing accuracy measurement methods, the present invention provides a high-precision large-aperture grating five-degree-of-freedom splicing accuracy measurement method

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  • High-precision large-aperture grating five-degree-of-freedom splicing precision measurement method

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specific Embodiment approach 1

[0032] Specific Embodiment 1: This embodiment provides a method for comprehensively utilizing reflected light and diffracted light to realize splicing accuracy measurement of large-aperture gratings. Based on the principle of light interference, the interference field of the zero-order reflected light and the first-order diffracted light of the grating is used. The pitch, deflection and rotation angles of the grating are measured respectively, and the two-dimensional translational accuracy of the grating is measured by the energy ratio of the split far-field focal spot. Specific steps are as follows:

[0033] 1. Measurement of the three-dimensional rotation accuracy of the grating

[0034] When the incident measuring beam passes through the seam of the spliced ​​grating, the spatial direction of the outgoing beam will be deflected, and the diffracted light generated by the two gratings will be imaged separately in the CCD image sensor, and the deflection angle of the beam can ...

specific Embodiment approach 2

[0064] Specific implementation mode 2: This implementation mode provides a method of comprehensively utilizing reflected light and diffracted light to realize the splicing accuracy measurement of large aperture gratings. In this method, three gratings composed of static gratings in the middle and moving gratings on both sides are spliced. The resulting large-aperture grating group is the object. Such as figure 1 and figure 2 As shown, the specific measurement steps are as follows:

[0065] Measurement step 1: The pitch angle θ of the moving grating B10 relative to the static grating 9 x and deflection angle θ y Measurement.

[0066] Adjust the optical path system so that the measurement sub-beams A1 and B1 emitted by the light source system 1 are transmitted by the half-mirror A2 and then incident on the seam between the static grating 9 and the moving grating B10, and the zero-order beam emitted by the moving grating B10 and the static grating 9 The reflected light retu...

specific Embodiment approach 3

[0071] Specific embodiment three: the difference between this embodiment and specific embodiment two is that the test optical path is switched: in the optical path system, the half mirror B7 and reflector A6 and reflector B11 arranged in parallel are increased in the optical path system, and the positions of other optical devices constant. The specific test steps are as follows:

[0072] Measurement step 1: The pitch angle θ of the moving grating A8 relative to the static grating 9 x and deflection angle θ y Measurement.

[0073] After the measurement sub-beams A1 and B1 emitted by the light source system 1 are transmitted by the half-mirror A2, and then reflected by the half-mirror B7 and the reflector A6 in turn, translation occurs, and the sub-beams after translation are A2 and B2, The sub-beams A2 and B2 are incident on the seam between the moving grating A8 and the static grating 9, and the zero-order reflected light emitted by the moving grating A8 and the static grat...

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Abstract

The invention discloses a high-precision large-aperture grating five-degree-of-freedom splicing precision measurement method. The method comprises the following steps that step one, grating three-dimensional rotation precision measurement: a test light beam is incident to the splicing slit of gratings to be spliced, and the three-dimensional rotation splicing precision, the pitch angle theta<x>, the deflection angle theta<y> and the rotation angle theta<z>, of the gratings to be spliced is acquired according to zero-order reflected light and first-order diffracted light generated by the splicing gratings; and step two, grating two-dimensional translational precision measurement: the pitch angle theta<x>, the deflection angle theta<y> and the rotation angle theta<z> are adjusted to the qualified range, the test light beam is incident to the splicing slit of the gratings to be spliced, and the two-dimensional translational precision of the gratings is measured according to the far-field focal spot energy ratio of the zero-order reflected light generated by the splicing gratings. The method has the advantages of being high in measurement precision, weak in the coupling degree between all the degrees of freedom and easy and convenient to operate so that the splicing efficiency and the splicing precision of the gratings can be effectively enhanced, and the method can be used for space five-degree-of-freedom splicing precision measurement of the splicing gratings.

Description

technical field [0001] The invention belongs to the field of splicing precision measurement, and relates to a method for realizing splicing precision measurement of large-diameter gratings by using reflected and diffracted light. Background technique [0002] As an important dispersive element, the diffraction grating is the core device of large optical systems and scientific instruments, and is widely used in astronomical spectrum analysis, laser inertial confinement fusion and other fields. Increasing the aperture of the grating can effectively improve the resolution and signal-to-noise ratio of the astronomical telescope system, and can also enhance the peak power and output capability of the high-energy short-pulse laser device. [0003] Under the condition that the direct manufacture of large-aperture gratings is still immature, the method of mechanical splicing to obtain large-aperture gratings is a solution with good economy, reliable quality and high efficiency. The...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/00
CPCG01M11/088
Inventor 白清顺何欣沈荣琦赵航张庆春
Owner HARBIN INST OF TECH
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