A kind of oil-free lubrication scroll vacuum pump

Abstract

The invention discloses an oil-free lubrication scroll vacuum pump. The pump comprises a movable scroll, a fixed scroll, a crankshaft, a motor, a rotation-prevention mechanism and an axial gap adjusting device; a static-balance-free design structure is adopted in the movable scroll, the movable balance property is improved, the scroll vacuum pump is more compact in whole size, a small-crank rotation prevention mechanism with the radial compliance and a crankshaft with the eccentric structure achieve joint action, the size of the rotation radius is adjusted, and it is ensured that movable scroll revolution and translation are more stable; in order to improve the air suction efficiency of the scroll vacuum pump, the fixed scroll is adopted, wherein the inner side profile and the outer side profile are not symmetric, and the fixed scroll is provided with a single air suction opening; the problems that due to the fixed scroll structure, the volumetric proportion in a work cavity is not equal, the scroll turns over, and the pressure fluctuates are solved through two manners of movable scroll tooth head cutting treatment or the exhaust hole opening range adjustment; meanwhile, an axial gap adjusting device adjusts the gap, caused by the machining error, at the combination position of a movable scroll disc and a fixed scroll disc, and the axial gap leakage is reduced.

Description

technical field [0001] The invention belongs to the technical field of scroll vacuum pumps, and in particular relates to a movable scroll, an anti-rotation mechanism and an exhaust structure suitable for an oil-free lubricated scroll vacuum pump. Background technique [0002] The scroll vacuum pump is a positive displacement vacuum pump. Because the volume of the compression chamber changes continuously, the driving torque changes little, the power changes small, and the vibration and noise are low. It has been widely used in the semiconductor industry, scientific instrument industry, and medical equipment industry. Scroll vacuum pump as the backing pump of molecular pump and small cryopump is the best configuration to obtain oil-free vacuum system. Scroll vacuum pumps usually adopt an eccentric structure to ensure the correct engagement of the movable scroll and the static scroll, and form multiple pairs of closed working chambers to realize the process of suction, compress...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of unequal volume ratio in the working chamber, vibration, and scroll overturning caused by the scroll vacuum pump with asymmetric inner and outer profiles and a static scroll structure with a single suction port, the mass of the movable scroll itself is not sufficient. Symmetrical, while improving the dynamic balance performance of the crankshaft, reducing leakage and vibration, the invention proposes an oil-free lubricated scroll vacuum pump structure

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