Built-in rotary cathode structure
A technology of rotating cathode and cathode, applied in the field of magnetron sputtering, can solve the problems of unfavorable large-area continuous production, poor universality of cathode gate structure, etc., achieve long-term stable sputtering work, reasonable design of water inlet and outlet, and improved uniformity sexual effect
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[0014] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0015] see figure 1 , in an embodiment of the present invention, a built-in rotating cathode structure includes a cathode gate 1, the cathode gate 1 is used in conjunction with a vacuum chamber, and the ultimate vacuum of the cathode gate 1 is 10 -5Pascal, and the working vacuum range is 0.01-10 Pascal, the lower end of one side of the cathode door 1 is provided with a motor seat 2, and the motor seat 2 is fixed on the cathode door 1 by bolts; the upper end of...
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