A method of iad plating for improving laser damage threshold and surface shape of optical devices

A laser damage threshold and optical device technology, which is applied in sputtering coating, vacuum evaporation coating, ion implantation coating, etc., can solve the problem that the quality of the output light spot cannot meet the requirements of use, the threshold value does not increase significantly, and the surface shape changes greatly. and other issues, to achieve the effect of stable product indicators, good density, and small scattering

Active Publication Date: 2018-11-13
青岛韬谱光学科技有限公司
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Problems solved by technology

Most enterprises and research institutions adopt the method of electron gun thermal evaporation. The film layer deposited by this method is relatively loose and has serious surface defects, while a few enterprises use ion beam sputtering (IBS) coating, but the stress is large, resulting in surface shape changes. Large, the quality of the output light spot can not meet the use requirements
Some enterprises and institutions use the method of post-plating post-treatment to increase the damage threshold, but the threshold increase is not obvious, and the surface shape does not change much when the stress is released by heating, and it will rebound as the use time increases

Method used

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Embodiment Construction

[0025] An IAD plating method for improving the laser damage threshold and surface shape of an optical device, comprising the following steps:

[0026] (1) Substrate processing, with ultraviolet fused silica as the substrate, the substrate processing is completed through the ultra-smooth polishing technology of the water area, so that the substrate can meet the following requirements: the roughness Ra value is better than 2 angstroms, and the surface shape is better than λ / 15. The finish is better than 10 / 5.

[0027] (2) Substrate cleaning, soak the substrate obtained in step 1 in the ultrasonic cleaning stock solution, rinse it with deionized water after taking it out, then perform ultrasonic cleaning with a continuous ultrasonic tank, and then slowly pull out the water, then use a spotlight Baking, then wipe clean with alcohol ether reagent (according to the ratio of alcohol: ether is 1:2.5), put it into the vacuum chamber to be plated;

[0028] (3) Vacuum coating, after put...

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Abstract

The invention belongs to the technical field of an optical coating and specifically relates to a plating method for increasing laser damage threshold and surface accuracy of an IAD plated high-reflectivity optical film. The method comprises the following steps: (1) processing a substrate, namely with ultraviolet fused quartz as the substrate, processing the substrate with a water-area ultra-smooth polishing technology, wherein the substrate meets the requirements that the roughness Ra value is more than 2 angstroms, the surface accuracy is more than lambda / 15 and the smoothness is more than 10 / 5; (2) cleaning the substrate, namely soaking the substrate acquired in the step 1) into an ultrasonic cleaning stock solution, taking out and then washing with deionized water, performing ultrasonic cleaning in a continuous ultrasonic wave tank, slowly taking out from water, baking under a spot lamp, wiping with an alcohol ether agent, and putting into a vacuum chamber for plating. According to the invention, the laser damage threshold and the surface accuracy are greatly promoted and the plated coating has the advantages of high compactness, less absorption, less scattering, simple operation method and stable product index.

Description

technical field [0001] The invention belongs to the technical field of optical coating, and specifically refers to a coating method for simultaneously improving the laser damage threshold and the surface shape of a highly reflective optical film coated with IAD. Background technique [0002] With the continuous improvement of industry (laser marking machine, laser cutting machine), medical laser equipment and military requirements on laser output power and spot quality, the damage threshold and surface shape of laser cavity mirror high reflective film are increasingly raised. How to prepare an all-dielectric laser reflective film that can not only have a high laser damage threshold but also meet high laser beam quality has become a hot research topic for domestic and foreign scholars, and it is also the goal pursued by optical coating companies. Most enterprises and research institutions adopt the method of electron gun thermal evaporation. The film layer deposited by this m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/46C23C14/08C23C14/10C23C14/54
CPCC23C14/083C23C14/10C23C14/46C23C14/54
Inventor 杨波魏清晨
Owner 青岛韬谱光学科技有限公司
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