Lithium tantalate substrate blackening method
A lithium tantalate and substrate technology, which is applied in the field of blackening lithium tantalate substrates, can solve problems such as explosion, depolarization, and high equipment requirements, and achieve high efficiency, low cost, and cheap prices
Inactive Publication Date: 2017-08-29
CHENGDU TIMEMAKER CRYSTAL TECH
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Problems solved by technology
This process has high efficiency, but it is prone to explosion hazards, requires high equipment and is prone to depolarization
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The invention discloses a lithium tantalate substrate blackening method. The method comprises embedding a lithium tantalate substrate in a quartz tank or a high temperature-resistant metal tank through C powder or graphite powder, feeding a substance containing water steam into a low vacuum reduction furnace, controlling a temperature in the low vacuum reduction furnace to 450-500 DEG C, keeping the temperature for 3-10h so that the substance and C powder undergo a reaction to produce a material shown in the description and CO and the lithium tantalate substrate undergo a reduction reaction, discharging exhaust gas, and after the reduction reaction, taking out the lithium tantalate substrate. The method utilizes the raw material C having a low price. Most of H2 and CO produced by the reaction and lithium tantalite undergo a reduction reaction so that efficiency is high and the production is safe.
Description
A kind of blackening method of lithium tantalate substrate technical field The invention relates to the field of blackening lithium tantalate substrates, in particular to a method for blackening lithium tantalate substrates. Background technique Lithium tantalate crystal is a typical multifunctional material with good piezoelectric, ferroelectric, pyroelectric, acousto-optic, electro-optic, photorefractive and nonlinear physical properties. It is used in surface acoustic wave devices, optical communications, Widely used in the field of laser and optoelectronics. The piezoelectric coefficient of lithium tantalate crystal is relatively large, so it is suitable for the substrate of low insertion loss surface acoustic wave filter. Lithium tantalate crystals have a high pyroelectric coefficient, so temperature changes will cause a large amount of static electricity on the surface of the wafer. These static charges will be automatically released between the wafers, especially ...
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IPC IPC(8): C30B33/02C30B29/30
CPCC30B33/02C30B29/30
Inventor 叶竹之陆旺李辉蒲波雷晗
Owner CHENGDU TIMEMAKER CRYSTAL TECH