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Ceramic substrate and method of making the same

A technology of ceramic substrate and manufacturing method, which is applied in the field of ceramic substrate, can solve problems such as becoming brittle, prone to cracks, and not easily deformed, and achieves the effects of low incidence of chipping, increased yield, and low cost

Active Publication Date: 2020-09-29
NGK INSULATORS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the Young's modulus is increased, it will become less deformable and brittle, so cracks are likely to occur, and there are problems such as chipping is likely to occur when the chip is divided

Method used

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  • Ceramic substrate and method of making the same
  • Ceramic substrate and method of making the same
  • Ceramic substrate and method of making the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0114] For Examples 1 to 11 and Comparative Examples 1 and 2, the crystal phases of the ceramic substrate, the intensity ratio of X-ray diffraction in each crystal phase, mechanical properties (bending strength (flexural strength) and Young's modulus), Electrical properties (relative permittivity and dielectric loss tangent).

[0115] (Example 1)

[0116] Prepare raw powder. The raw material powder is 3Al with an average particle size of 1.7 μm 2 o 3 2SiO2 2 (Malusite) powder, ZrO with an average particle size of 0.5 μm 2 Powder, MnO powder with an average particle diameter of 1.0 μm.

[0117] Press the raw material powder into 3Al 2 o 3 2SiO2 2 (Malusite) powder: 86.3% by mass, ZrO 2 Powder: 8.0% by mass and MnO powder: 5.7% by mass were mixed to obtain a mixed powder. That is, as shown in Table 2, the porcelain composition of the mixed powder comprises: 2 o 3 Converted to 62.0% by mass of Al, as ZrO 2 Converted to 8.0% by mass of Zr, based on SiO 2 Si is 24.3 m...

Embodiment 2

[0121] A ceramic substrate according to Example 2 was produced in the same manner as in Example 1 above except that 1.4% by mass of BaO powder having an average particle diameter of 1.0 μm was added as an additive to the raw material powder. That is, the porcelain composition of embodiment 2 is: when Al 2 o 3 , ZrO 2 , SiO 2 When the total of MnO and MnO is 100% by mass, Ba is contained in an amount of 1.4% by mass in terms of BaO.

Embodiment 3

[0123] Composition of porcelain as raw material powder, containing Al 2 o 3 Converted to 50.4% by mass of Al, as ZrO 2 Converted to 24.1% by mass of Zr, as SiO 2 The ceramic substrate according to Example 3 was produced in the same manner as in Example 2 above except that Si was 19.8 mass % in terms of MnO and Mn was 5.7 mass % in terms of MnO.

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Abstract

The present invention pertains to a ceramic base material and a method for producing the same. The ceramic base material contains a crystal phase having 3Al2O3⋅2SiO2 as the main crystal phase, as well as Al2O3 and ZrO2. The flexural strength is 450 Ma or higher, and the Young's modulus is 240 GPa or lower.

Description

technical field [0001] The present invention relates to a ceramic substrate, for example, a ceramic substrate suitable for use in a ceramic package in which elements such as a vibrator are mounted, a high-frequency circuit board, and a method for manufacturing the same. Background technique [0002] As an existing ceramic matrix, for example mullite (3Al 2 o 3 2SiO2 2 ) as a main component (mullite substrate), ceramic substrates described in JP-A-2010-098049, JP-A-2012-137345, and JP-A-2012-138432 are known. [0003] Regarding the multilayer ceramic substrate described in Japanese Unexamined Patent Publication No. 2010-098049, the content of mullite is 93 to 99% by mass of the ceramic components, and as components other than mullite, Mg and Y are included. At least one of W and Mo is included in the multilayer ceramic substrate as a component of the conductive layer. [0004] Regarding the mullite sintered body described in Japanese Patent Application Laid-Open No. 2012-...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/18
CPCC04B35/18
Inventor 河野浩梅田勇治伊藤阳彦
Owner NGK INSULATORS LTD