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Rotatable water-cooling type electrode device for evaporator

A technology of electrode device and rotating device, which is applied in the direction of vacuum evaporation plating, ion implantation plating, metal material coating technology, etc., can solve the problems of inability to perform automatic cooling, etc., so as to improve the range of use, improve the heat dissipation effect, reduce the The effect of the loss of current

Pending Publication Date: 2017-09-05
CHENGDU CVAC VACUUM TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the defect that the existing electrode device cannot be automatically cooled during work, and to provide a rotatable water-cooled electrode device for evaporators

Method used

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  • Rotatable water-cooling type electrode device for evaporator
  • Rotatable water-cooling type electrode device for evaporator

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Embodiment

[0025] Such as figure 1 , 2 As shown, the present invention discloses a rotatable water-cooled electrode device for an evaporator, which mainly consists of a support cylinder 9, an electrode rod 1 arranged in the support cylinder 9, a power connection device arranged on the electrode rod 1, and a The mounting assembly on the support cylinder 9 is formed. Wherein, a water-cooling device is provided on the electrode rod 1, and the water-cooling device is as figure 2 Said 2 includes a water inlet pipe 24 , a transition seat 16 , and a rotary water joint 17 . A rotating device matched with the electrode rod 1 is also arranged in the supporting cylinder 9, such as figure 2 As shown, it includes a rotating vacuum-sealed outer casing 8 , a rotating inner shaft 27 , and a timing pulley 11 . The electrical connection device such as figure 2 As shown, it includes an electrode hoop 14 and an annular electrode disc 13 .

[0026] Such as figure 2 As shown, the electrode rod 1 in...

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Abstract

The invention discloses a rotatable water-cooling type electrode device for an evaporator. The rotatable water-cooling type electrode device mainly consists of an electrode stem (1), a supporting barrel (9) connected with the electrode stem (1), a power connection device arranged on the electrode stem (1), and a mounting assembly which is arranged on the supporting barrel (9) and is connected with the electrode stem (1). According to the rotatable water-cooling type electrode device disclosed by the invention, the electrode stem is set to be a hollow electrode stem, so that radiating effect of the electrode stem is effectively improved; a water-cooling device is further arranged in the electrode stem for cooling the electrode stem very well, so that the electrode stem realizes automatic cooling in work, ensures insulating and sealing parts inside an electrode device from being not liable to damage at a high temperature very well, and therefore, the service life of the electrode device is greatly prolonged.

Description

technical field [0001] The invention relates to an electrode device for an evaporator, in particular to a rotatable water-cooled electrode device for an evaporator. Background technique [0002] The evaporation resistance film is generally heated by the target to make the surface components evaporate in the form of atomic groups or ions, and the atomic groups or ions of the target are deposited on the surface of the substrate. structure - layered growth) forms a thin film. In order to increase the evaporation rate of the target, the staff will provide high current to the evaporation boat used to evaporate the target, so that the temperature of the evaporation boat can quickly reach the evaporation temperature of the target, thereby not only increasing the evaporation rate of the target, but also improving The efficiency of the evaporation barrier film is improved. [0003] However, the higher the current applied to the electrode device, the higher the temperature of the el...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/26
CPCC23C14/26
Inventor 杨小军向勇孙力
Owner CHENGDU CVAC VACUUM TECH CO LTD
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