Evaporation crucible and evaporation device

Abstract

The invention provides a vapor plating crucible. The crucible comprises a body, an accommodating chamber is formed in the crucible body, a heat conduction structure is arranged in the accommodating chamber, the heat conduction structure comprises several heat conduction spacing bodies, several heat conduction spacing bodies are used for dividing the accommodating chamber into several subsidiary accommodating chambers with openings, and the accommodating subsidiary chambers are mutually communicated. Correspondingly, the invention also provides a vapor plating apparatus.

Description

technical field [0001] The invention relates to the field of manufacturing display devices, in particular to an evaporation crucible and an evaporation device. Background technique [0002] Vacuum evaporation method is the key technology for preparing organic light-emitting display devices (Organic Light-Emitting Diode, OLED). The evaporation process often uses a crucible to heat the evaporated material to evaporate it. However, due to the thermal conductivity of the evaporated material Therefore, the temperature of the material to be evaporated near the side wall of the crucible tends to rise faster, while the material to be evaporated farther away from the side wall is heated slowly, so that the evaporation rate of the material near the side wall of the crucible is greater than that of the center of the crucible. The evaporation rate of the material is reduced, forming a sand pile structure, which in turn leads to the collapse of the evaporated material accumulated in the ...

AI Technical Summary

Problems solved by technology

[0002] Vacuum evaporation method is the key technology for preparing organic light-emitting display devices (Organic Light-Emitting Diode, OLED). The evaporation process often uses a crucible to heat the evaporated material to evaporate it. However, due to the thermal conductivity of the evaporated material Therefore, the temperature of the material to be evaporated near the side wall of the crucible tends to rise faster, while the material to be evaporated farther away from the side wall is heated slowly, so that the evaporation rate of the material near the side wall of the crucible is greater than that of the center of the crucible. The evaporation rate of the material is reduced, forming a sand pile structure, which leads to the collapse of the evaporated material accumulated in the crucible, causing a significant change in the evaporation rate

In order to increase the evaporation rate in the central area, it is necessary to increase the heating temperature, which will easily cause the material near the side wall to be overheated and denatured, resulting in material waste and affecting device performance.

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