Graphene tumor marker sensor based on multifunctional nanoscale protein film and preparation method thereof
A tumor marker, nano-scale technology, applied in the direction of instruments, scientific instruments, biological testing, etc., can solve the problems of difficult control of adsorption amount, easy introduction of false positive signals, etc., and achieve good application prospects, strong versatility, and improved performance Effect
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[0031] Such as figure 1 Shown, the preparation process of this embodiment is as follows:
[0032] With 300nm silicon dioxide on the silicon substrate, titanium gold electrodes are made on the surface of silicon dioxide by lift-off process as the drain and source respectively, and single-layer graphene is transferred on the surface of the gold electrode. The process steps Such as figure 2 (a) shown. Add the BSA solution dropwise on the graphene surface, and inactivate the graphene surface at 80°C for 3 minutes to form an inactivated BSA protein film. The process steps are as follows: figure 2 (b) shown. The size of the graphene channel is determined by photolithography and the part other than the channel is etched away by oxygen plasma etching. The process steps are as follows figure 2 (c) and figure 2 (d) shown. Finally, acetone is used to dissolve the photoresist for channel protection. The process is as follows: figure 2 As shown in (e), the SU-8 photoresist is ...
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