Manufacturing method of array substrate and manufacturing method of display device

A manufacturing method and array substrate technology, which are applied in the fields of final product manufacturing, sustainable manufacturing/processing, semiconductor/solid-state device manufacturing, etc., can solve problems such as increased production costs, threshold voltage drift, and long production cycles of flexible OLEDs. The effect of production cycle, avoiding threshold voltage drift, and reducing production cost

Active Publication Date: 2017-09-19
BOE TECH GRP CO LTD
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  • Description
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Problems solved by technology

[0004] The production cycle of the above-mentioned flexible OLED manufacturing method is relatively long, resulting in an increase in production cost
Moreover, when making the isolation layer and the isolation column, due to the need for two photolithography processes, the energy of the second exposure is too large, resulting in a threshold voltage shift (Vth shift) of the TFT due to a large area of ​​ultraviolet radiation.

Method used

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  • Manufacturing method of array substrate and manufacturing method of display device
  • Manufacturing method of array substrate and manufacturing method of display device
  • Manufacturing method of array substrate and manufacturing method of display device

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Embodiment Construction

[0038] In order to enable those skilled in the art to better understand the technical solution of the present invention, the manufacturing method of the array substrate and the manufacturing method of the display device provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0039] figure 1 It is a flowchart of a manufacturing method of an array substrate provided by the first embodiment of the present invention. See figure 1 , The manufacturing method of the array substrate includes:

[0040] Making the isolation column while making the isolation layer includes the following steps:

[0041] S1, the film 13 forming the isolation layer, the film 13 of the isolation layer is made of organic materials, such as Figure 2A Shown.

[0042] S2, patterning the thin film 13 of the isolation layer to form the pattern 13a and the isolation portion 13b required for the isolation layer, such as Figure 2B Shown.

[0043] S3, high temperatur...

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Abstract

The present invention provides a manufacturing method of an array substrate and a manufacturing method of a display device. According to the invention, when an isolation layer is manufactured, an isolation column is manufactured at the same time. The method specifically comprises the following steps of S1, forming an isolation layer, wherein the film of the isolation layer is made of organic materials; S2, patterning the film of the isolation layer to form a desired pattern and an isolation part of the isolation layer; S3, subjecting the isolation part to high-temperature treatment to increase the thickness of the isolation part and form an isolation column. According to the manufacturing method of the array substrate, not only the production period can be shortened, but also the production cost is reduced. Meanwhile, the generation of threshold voltage drift of a TFT due to the large-area ultraviolet irradiation can be avoided.

Description

Technical field [0001] The present invention relates to the field of display technology, in particular, to a manufacturing method of an array substrate and a manufacturing method of a display device. Background technique [0002] Organic light-emitting diode (OLED) display technology is widely used in mobile phones, digital video cameras, DVD players, personal digital assistants (PDAs), notebook computers, car stereos, TVs, and so on. Currently, OLED products are mainly realized through 9 mask steps. [0003] The structure of the existing flexible OLED mainly includes a substrate and a guiding film layer, a transition layer, an active layer, two gates, a connection layer, a source electrode and a drain electrode, a flat layer, an electrode layer, and an isolation layer sequentially arranged on the substrate. Layers and spacers. Among them, the manufacturing method of the above-mentioned flexible OLED is mainly through the photolithography process of 9 masks, which are the active ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H01L27/32
CPCH10K59/12H10K2102/311H10K71/00Y02E10/549Y02P70/50H10K59/123H10K59/1213H10K77/111H10K50/8428H10K59/1201H10K59/87H10K50/84
Inventor 刘文渠董立文张锋吕志军党宁张世政
Owner BOE TECH GRP CO LTD
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