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A self-assembled nano-oxynitride high temperature resistant coating and its preparation method

An oxynitride, self-assembly technology, applied in coating, nanotechnology, metal material coating process, etc., can solve problems such as poor mechanical properties such as hardness and toughness, achieve good adaptability, good thermal stability, reduce The effect of cutting friction

Active Publication Date: 2019-03-05
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Oxide coating has better thermal stability, chemical stability and high temperature oxidation resistance, and is more suitable for high-speed cutting, but poor mechanical properties such as hardness and toughness limit its application; nitride / oxide multilayer composite can improve oxidation Physical and mechanical properties, TiAlN / Al 2 o 3 Multi-layer tool coatings have good cutting performance, but the special deposition process of oxides limits its popularization and application

Method used

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  • A self-assembled nano-oxynitride high temperature resistant coating and its preparation method
  • A self-assembled nano-oxynitride high temperature resistant coating and its preparation method
  • A self-assembled nano-oxynitride high temperature resistant coating and its preparation method

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Effect test

Embodiment 1

[0034] A self-assembled nanometer multilayer oxynitride high temperature resistant coating comprises an AlTiN support layer, an AlCrSiON oxygen-enriched layer and an AlCrSiON nitrogen-enriched layer. The atomic percent content of each element in the AlTiN support layer is: Al: 28 at.%, Ti: 16 at.%, N: 56 at.%. The thickness of the oxygen-rich layer is 2nm, the thickness of the nitrogen-rich layer is 5nm, the atomic percentage content of each element in the coating is: Al: 20at.%, Cr: 10at.%, Si: 15at.%, O: 50at.%, N : 5 at.%.

[0035] Polish the cemented carbide, ultrasonically clean it with acetone and alcohol for 10 minutes, dry it with nitrogen, and put it into a vacuum chamber. Turn on the heater to raise the temperature to 250°C, and evacuate the vacuum chamber to a vacuum degree of 1.0×10 -3Below Pa. 350 sccm of Ar gas was introduced, the bias voltage of the workpiece support was set to -1000V, and the substrate surface was cleaned by sputtering, and the bombardment t...

Embodiment 2

[0040] A self-assembled nanometer multilayer oxynitride high temperature resistant coating comprises an AlTiN support layer, an AlCrSiON oxygen-enriched layer and an AlCrSiON nitrogen-enriched layer. The atomic percent content of each element in the AlTiN support layer is: Al: 27 at.%, Ti: 17 at.%, N: 56 at.%. The thickness of the oxygen-rich layer is 8nm, the thickness of the nitrogen-rich layer is 30nm, the atomic percentage content of each element in the coating is: Al: 25at.%, Cr: 15at.%, Si: 5at.%, O: 5at.%, N : 50at.%.

[0041] Polish the cemented carbide, ultrasonically clean it with acetone and alcohol for 15 minutes, then dry it with nitrogen and put it into a vacuum chamber. Turn on the heater to raise the temperature to 350°C, and evacuate the vacuum chamber to a vacuum degree of 5.0×10 -3 Below Pa. 250 sccm of Ar gas was introduced, the bias voltage of the workpiece support was set to -800V, and the surface of the substrate was cleaned by sputtering, and the bom...

Embodiment 3

[0046] A self-assembled nano-oxynitride high-temperature resistant coating comprises an AlTiN support layer and an AlCrSiON (oxygen-enriched) / AlCrSiON (nitrogen-enriched) functional layer. The atomic percent content of each element in the AlTiN support layer is: Al: 28 at.%, Ti: 15 at.%, N: 57 at.%. The thickness of the oxygen-rich layer is 12nm, and the thickness of the nitrogen-rich layer is 60nm. The atomic percentage content of each element in the coating is: Al: 30at.%, Cr: 20at.%, Si: 10at.%, O: 15at.%, N :25 at.%. Polish the cemented carbide, ultrasonically clean it with acetone and alcohol for 15 minutes, then dry it with nitrogen and put it into a vacuum chamber. Turn on the heater to raise the temperature to 400°C, and evacuate the vacuum chamber to a vacuum degree of 5.0×10 -3 Below Pa. 300 sccm of Ar gas was introduced, the bias voltage of the workpiece support was set at -900V, and the surface of the substrate was cleaned by sputtering, and the bombardment time...

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Abstract

The invention discloses a preparing method of a self-assembled nano oxynitride high-temperature-resisting coating. An arc ion plating method and a magnetron sputtering method are adopted, an AlTiN coating serves as a supporting layer, the staying time of a sample in different plasma areas is changed by adjusting the rotation speed and the revolution speed of a sample rotation frame according to the phenomenon that plasma energy and density distribution of a target material in different distance ranges are different, and accordingly self-assembling generation of multiple nano layers in the coating is achieved. The coating is composed of an oxygen enrichment layer and a nitrogen enrichment layer on the basis of the AlTiN supporting layer, and the oxygen enrichment layer and the nitrogen enrichment layer are alternately deposited on a hard alloy or a ceramic base body. The total thickness of the coating is controlled to range from 2 microns to 10 microns, the thickness of the AlTiN supporting layer is controlled to range from 1.5 microns to 3.5 microns, the single-layer thickness of the oxygen enrichment layer is controlled to range from 2 nm to 20 nm, and the single-layer thickness of the nitrogen enrichment layer is controlled to range from 5 nm to 100 nm. The coating is mainly applied to the cutter product surface protection field.

Description

technical field [0001] The invention belongs to the technical field of material coatings, and more specifically relates to a self-assembled nano-oxynitride high-temperature resistant coating and a preparation method thereof. Background technique [0002] Superalloys are key materials for the manufacture of aero-engines, and have irreplaceable applications in civilian industries such as vehicles, thermal power, nuclear power, and petrochemical industries. However, they are extremely difficult to machine, and the relative processability is only 5%-15%. High, adhesion, work hardening and tool wear are severe, and cutting is a bottleneck problem for superalloy applications. Coated carbide has good comprehensive properties and is the preferred tool material. Physical vapor deposition (PVD) coatings have sharp cutting edges, and compressive stress suppresses cracks. PVD coatings are dominant in high-speed hard milling applications; high-aluminum nitride coatings (such as AlTiN, A...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/02C23C14/06C23C14/32C23C14/35B82Y40/00B23B27/00
CPCB23B27/00B82Y40/00C23C14/0021C23C14/0036C23C14/022C23C14/0641C23C14/0676C23C14/325C23C14/35
Inventor 王启民黎海旭代伟吴正涛耿东森
Owner GUANGDONG UNIV OF TECH
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