Ray space angle position finder

A technology of ray space and locator, which is applied in the direction of instruments, measuring angles, measuring devices, etc., can solve the problem of small coating angles, achieve high accuracy, improve coating quality, and improve process precision.

Inactive Publication Date: 2017-09-22
HAIDIKE NANTONG OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the field of scientific research, vacuum coating generally adopts the method of coating with the substrate directly above the target, but the research on the coating angle is less.

Method used

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Experimental program
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Effect test

Embodiment

[0021] The ray space angle locator of this embodiment, such as figure 1 As shown, it includes a circular base 1, and an angle plate 2 that can rotate 360 ​​degrees is arranged on the upper end of the circular base 1, and the angle plate 2 is a fan-shaped structure with a central angle of 30-180°. The accuracy of the angle plate 2 0.1° to 1°; the circular base 1 is provided with a rotating shaft passing through the angle disc 2 in the middle, and the angle disc 2 rotates 360 degrees around the rotating shaft.

[0022] The angle disk is a fan-shaped structure with a central angle of 30° to 180°, so that the range of the angle between the substrate and the target source rays can be wider, and it can be used to control the angle between the substrate and the target source rays in different ranges.

[0023] On the angle plate 2, there is a sliding guide groove 21 arranged along the arc extension direction of the angle plate 2, and a movable telescopic arm 3 is also arranged on the ...

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PUM

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Abstract

The invention relates to a ray space angle position finder comprising a base. The ray space angle position finder is characterized in that an angle scale capable of rotating by 360 degrees is movably connected to the base, a movable telescopic arm capable of rotating along the direction of the angle scale is slidably connected to the angle scale, and an angle positioning plate is fixedly connected to the upper end face of the movable telescopic arm. The ray space angle position finder has the advantages that when the base is disposed on the horizontal plane, the movable telescopic arm is rotated to keep the time thereof parallel to a ray on the angle scale, and when a to-be-detected plane is controlled to be parallel to the angle positioning plate, an angle between the to-be-detected plane and the ray is a required angle; an angle between the substrate and the target-derived ray can be kept consistent at any time and quantified precisely through the ray space angle position finder, so that vacuum evaporation technological precision is improved and the coating film quality is further enhanced.

Description

technical field [0001] The invention belongs to industrial measuring devices, in particular to a ray space angle locator used between a substrate and a target source ray. Background technique [0002] With the development of the economy and the improvement of living standards, vacuum coating technology has been widely used in many fields such as decorations, building materials, flat panel displays, information storage, integrated circuits, epitaxy and substrate processing. [0003] Taking the field of substrate processing as an example, in order to ensure production capacity, the industrial vacuum coating machine performs coating processing on dozens or even dozens of substrates at the same time. The substrates are usually arranged one by one in the spherical vacuum coating hood. Because the angles between different substrates and the horizontal plane in the spherical coating hood are different, the coating effect will be different. In addition, in the field of scientific r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C1/00
CPCG01C1/00
Inventor 王肖磊宗东海孙智江
Owner HAIDIKE NANTONG OPTOELECTRONICS TECH CO LTD
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