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Shoot-through-preventing PWM (pulse-width modulation) drive circuit of vacuum coated power supply

A driving circuit, vacuum coating technology, applied in the direction of electrical components, output power conversion devices, etc., can solve problems such as permanent damage to the power supply, and achieve the effects of increasing service life, improving performance, and improving reliability

Inactive Publication Date: 2017-09-26
FOSHAN FOXIN VACUUM TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In the past, the vacuum coating power inverter used to drive the full bridge one-to-one, that is, four independent drivers. In this way, if one driver fails, the bridge arm of the inverter will have a straight-through phenomenon, making the power supply permanent. damage

Method used

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  • Shoot-through-preventing PWM (pulse-width modulation) drive circuit of vacuum coated power supply

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Embodiment Construction

[0018] The content of the present invention will be further described below in conjunction with the embodiments.

[0019] The anti-straight-through PWM driving circuit of the vacuum coating power supply includes a main power supply, the main power supply is connected to at least one PWM driving circuit, the PWM driving circuit is connected to a frequency conversion transformer, and the frequency conversion transformer is connected to at least one insulated gate bipolar transistor.

[0020] Preferably, the variable frequency transformer is a soft magnetic transformer.

[0021] Preferably, the soft magnetic transformer is a soft ferrite transformer.

[0022] Preferably, the power supply inputs electricity to the PWM drive circuit, and then the PWM drive circuit is directly connected to the soft magnetic transformer, and then the soft magnetic transformer is connected to one pole of at least one insulated gate bipolar transistor, and only one pole can be connected .

[0023] Pr...

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Abstract

The invention provides a shoot-through-preventing PWM (pulse-width modulation) drive circuit of a vacuum coated power supply. The circuit comprises a main power supply, wherein the main power supply is connected with at least one PWM drive circuit, and the PWM drive circuit is connected with a variable frequency transformer which is connected with at least one insulated-gate bipolar transistor. A driver and transformer combination is adopted, a shoot-through phenomenon is avoided in circuit topology, accordingly, a bridge arm is protected effectively, and the reliability of the power supply is greatly improved. The PWM drive circuit is connected with the variable frequency transformer, the performance of the variable frequency transformer is improved, the variable frequency transformer is made of a new material, the service life of the variable frequency transformer is prolonged, and the shoot-through problem of the variable frequency transformer is solved.

Description

technical field [0001] The invention relates to the technical field of power supply drive circuits, in particular to an anti-through PWM drive circuit for a vacuum coating power supply. Background technique [0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a relatively high degree of vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is to divide into evaporation and sputtering. [0003] What needs to be coated is called the substrate, and the plated material is called the target. The substrate and the target are in the same vacuum chamber. [0004] Evaporation coating generally heats the target material so that the surface components are evaporated in the form of atomic groups or ions. And it settles on the surface of the substrate to form a thin film through the film-forming process (scattered point-island...

Claims

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Application Information

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IPC IPC(8): H02M1/088H02M1/38
CPCH02M1/088H02M1/38
Inventor 武文全
Owner FOSHAN FOXIN VACUUM TECH CO LTD
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