Cleaning method for monocrystal pulling device, cleaning tool used for same, and production method for monocrystal

一种提拉装置、单晶的技术，应用在清洁方法和用具、利用气体流动的清洁方法、自熔融液提拉法等方向，能够解决单晶提拉装置结构复杂、难以完全扫除单晶提拉装置各个角落、无法降低单晶位错化的发生率等问题，达到降低位错化的发生率、减少异物的脱离的效果

Active Publication Date: 2017-09-26
SUMCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, due to the complex structure of the single crystal pulling device, it is difficult to completely sweep every corner of the single crystal pulling device
Therefore, the incidence of dislocations in single crystals cannot be reduced only by disassembly and cleaning

Method used

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  • Cleaning method for monocrystal pulling device, cleaning tool used for same, and production method for monocrystal
  • Cleaning method for monocrystal pulling device, cleaning tool used for same, and production method for monocrystal
  • Cleaning method for monocrystal pulling device, cleaning tool used for same, and production method for monocrystal

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Embodiment Construction

[0051] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

[0052] figure 1 It is a schematic cross-sectional view showing the structure of the single crystal pulling device 1 to be cleaned according to the present invention.

[0053] like figure 1 As shown, the single crystal pulling device 1 is a device for manufacturing silicon single crystals for semiconductors by the CZ method, and includes a chamber 10, a heat insulating material 11 disposed inside the chamber 10, and a support housed in the chamber 10. The base 13 of the quartz crucible 12, the rotation support shaft 14 supporting the base 13 in a liftable manner, the heater 15 arranged to surround the base 13, the heat shield 16 arranged above the base 13, and The single crystal pulling wire 17 arranged above the susceptor 13 and coaxially with the rotation support shaft 14 and the wire rope take-up mechanism 18 arranged above the chamber 10 .

[0...

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Abstract

To provide a cleaning method for a monocrystal pulling device capable of removing foreign matter in a chamber to prevent occurrence of dislocation. A cleaning method for a monocrystal pulling device according to the present invention involves: preparing a dummy crucible that simulates a crucible by including a dummy liquid surface simulating a liquid surface of a raw material melt in the crucible and a first dummy ingot simulating a monocrystal ingot that is being pulled upward from the liquid surface of the raw material melt; supplying an inert gas into a decompressed chamber of the monocrystal pulling device in a state where the dummy crucible is placed in the chamber; and generating a flow of the inert gas affected by the dummy crucible, thereby causing foreign matter attached to the wall surface of the chamber or to a component in the chamber to fall off.

Description

technical field [0001] The present invention relates to a cleaning method for a single crystal pulling device used in the manufacture of a single crystal based on the Czochralski method (hereinafter referred to as the CZ method), in particular to a cleaning method that cannot be removed by conventional disassembly cleaning. The method of cleaning the small garbage, dust and other foreign matter remaining in the chamber. Furthermore, the present invention relates to a cleaning tool used in the above-mentioned cleaning method and a method of manufacturing a single crystal using the above-mentioned cleaning method. Background technique [0002] In the production of silicon single crystals by the CZ method, the steam generated during the pulling process, the wear powder of the wire rope, and the carbon dust generated by the deterioration of the carbon components adhere to various places in the single crystal pulling device after the pulling process is completed. , Various forei...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): C30B15/00C30B29/06
CPCC30B15/00C30B29/06C30B15/10C30B35/00B08B5/02B08B9/08
Inventor冲田宪治
OwnerSUMCO CORP