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Radio frequency power source

A technology of radio frequency power supply and power supply module, applied in the field of radio frequency, to achieve the effect of simple structure and convenient use

Active Publication Date: 2017-12-08
WUHAN YUBO TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The traditional RF power multi-purpose control module controls the power amplifier module to generate high-frequency voltage and current to achieve the effect of RF power source, and there are certain defects in control timing and stability

Method used

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  • Radio frequency power source
  • Radio frequency power source
  • Radio frequency power source

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Such as figure 1 , 2 As shown, a radio frequency power supply includes: a power supply module 1, a processing module 2, and four output modules 3; the power supply module 1 includes: a power supply connector 101, a first power supply module 102, and a second power supply module 103; the output module 3 includes: Control module 301, decimal counter 302, step-up transformer 303 and a pair of output sub-modules 304, control module 301, decade counter 302 are connected in sequence, decade counter 302 is connected with one end of a pair of output sub-module 304 respectively, step-up transformer 303 respectively It is connected to the other end of a pair of output sub-modules 304; the power supply connector 101 is connected to the first power supply module 102 and the second power supply module 103 respectively, the first power supply module 102 is connected to the processing module 2, and the second power supply module 103 is connected to the four The control module 301 is ...

Embodiment 2

[0044] Such as image 3 As shown, this embodiment provides a radio frequency power supply. The difference from Embodiment 1 is that the output module 3 further includes an electrolytic capacitor 305, and the electrolytic capacitor 305 is connected to the two field effect transistors 3042 and the step-up transformer 303 of the output module 3;

[0045] The specific capacitance per unit volume of the electrolytic capacitor 305 is extremely large, and can perform functions such as power filtering, decoupling, signal coupling, time constant setting, DC blocking, etc., and can better cooperate with the field effect transistor 3042 and the step-up transformer 303 .

[0046] In this embodiment, the output module 3 further includes a CBB capacitor 306, which is connected to the step-up transformer 303; the CBB capacitor 306 has the characteristics of good reliability, strong temperature resistance, small volume and large capacity.

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PUM

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Abstract

The invention discloses a radio frequency power source, comprising a power supply module, a processing module and four output modules; the power supply module includes a power supply connector, a first power supply module and a second power supply module; each output module includes a control module, a decimal counter, a boosting transformer and a pair of output sub-modules, wherein the control module and the decimal counter are connected in sequence, the decimal counter is connected with one ends of the pair of output sub-modules, and the boosting transformer is connected with the other ends of the pair of output sub-modules. The power supply connector is connected with the first power supply module and the second power supply module, the first power supply module is connected with the processing module, and the second power supply module is connected with the four control modules. The processing module is connected with the four control modules. The radio frequency power source is simple in structure and convenient to use; the pairs of output sub-modules of the four output modules are used to form the stable radio frequency power source.

Description

technical field [0001] The invention relates to the field of radio frequency technology, in particular to a radio frequency power supply. Background technique [0002] In the semiconductor manufacturing industry, in the process of producing semiconductor devices such as chips and processors, thin-film solar cells, and flat-panel displays such as liquid crystals, RF power supplies are used, and RF power supplies are required as RF power sources. [0003] The traditional RF power multi-purpose control module controls the power amplifier module to generate high-frequency voltage and current to achieve the effect of RF power source, and there are certain defects in control timing and stability. Contents of the invention [0004] The purpose of the invention is to provide a radio frequency power supply, which has a simple structure and is easy to use, and a stable radio frequency power supply is composed of a pair of output sub-modules of four output modules. [0005] The abov...

Claims

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Application Information

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IPC IPC(8): G05F1/56
CPCG05F1/561
Inventor 王宏根廖传飞凌强强
Owner WUHAN YUBO TECH CO LTD
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