Silicon wafer drying tank

Abstract

The invention discloses a silicon wafer drying tank. The silicon wafer drying tank comprises an inner box and an outer box; the inner box is located inside the outer box; a separating space is formed between the inner box and the outer box, and the inner box and the outer box are each provided with an upward opening, and the openings are the same in size; a tank body for containing a silicon wafer basket is formed inside the inner box, and first air holes are uniformly distributed in at least one side face of the inner box; heating pipes are installed in the separating space and right face the first air holes; second air holes are uniformly distributed in the bottom face of the inner box; and at least one centrifugal fan is installed in the separating space and is axially perpendicular to the bottom face of the inner box. The silicon wafer drying tank has the advantages that silicon wafers are dried in the tank, the equipment size is decreased, the cost is low, power consumption is also low, the power consumption of the silicon wafer drying tank is about 1/3 of that of a previous silicon wafer drying tank, and the service life of a silicon wafer carrier is prolonged.

Description

technical field [0001] The present application relates to a silicon wafer drying device, in particular to a silicon wafer drying tank. Background technique [0002] In the prior art, the silicon wafer washing machine is dried in a drying tunnel. This disadvantage is that it occupies a large area, consumes a lot of power, and the production cost is high, and the silicon wafer carrier such as the silicon wafer flower basket will shorten the life of the wafer under high temperature for a long time. . Contents of the invention [0003] The object of the present invention is to provide a silicon wafer oven to overcome the deficiencies in the prior art. [0004] To achieve the above object, the present invention provides the following technical solutions. [0005] The embodiment of the present application discloses a silicon wafer oven, which includes an inner box and an outer box, the inner box is located inside the outer box, and a space is formed between the inner box and t...

AI Technical Summary

Problems solved by technology

[0002] In the prior art, the silicon wafer cleaning machine is dried in a drying tunnel. This disadvantage is that it occupies a large area, consumes a lot of power, and the production cost is high, and the silicon wafer carrier such as the silicon wafer flower basket will shorten the life of the wafer under high temperature for a long time.

Images