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Driving assembly and flexible precise positioning platform

A driving component and precise positioning technology, which is applied to the parts of the instrument, the instrument, etc., can solve the problems that the movement amount and movement ability are difficult to meet complex working conditions, the piezoelectric positioning platform has less degrees of freedom, and lacks the ability to rotate and swing. Achieve the effect of light weight, compact structure and improved positioning performance

Active Publication Date: 2017-12-15
HENAN POLYTECHNIC UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, most of the piezoelectric positioning platforms at this stage have less degrees of freedom, limited motion dimensions, lack of rotation and swing capabilities, and small strokes. Their movement and motion capabilities are difficult to meet the needs of complex working conditions.

Method used

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  • Driving assembly and flexible precise positioning platform
  • Driving assembly and flexible precise positioning platform
  • Driving assembly and flexible precise positioning platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] like figure 1 As shown, the driving assembly 10 provided by Embodiment 1 of the present invention includes a first piezoelectric driver 103, a flexible driving body 105, and a first pretensioning member 108, and the first pretensioning member 108 fixes the first piezoelectric driver 103 on the flexible When the driving body 105 is energized to the first piezoelectric driver 103, the first piezoelectric driver 103 will be extended or shortened correspondingly, so that the half-bridge driving part 1056 of the flexible driving body 105 connected to it will output displacement .

[0048] The specific structure of each component of the drive assembly 10 and the corresponding relationship among them will be described in detail below.

[0049] Please refer to figure 2 As shown, the flexible driving body 105 includes a fixed platform 1052, a plurality of first flexible hinges 1054 and a plurality of half-bridge driving parts 1056, which are processed by a wire cutting proces...

Embodiment 2

[0061] Embodiment 2 of the present invention provides a flexible precision positioning platform 100, please refer to image 3 and Figure 4 As shown, it includes a vertical drive assembly 20, an output platform 22, a base 25, a support member 28, and the drive assembly 10 provided in Embodiment 1, wherein the drive assembly 10 is a horizontal drive assembly 15 in Embodiment 2, and the specific description is as follows :

[0062] First, the structure of the base 25 and the support 28 is described in detail, wherein the base 25 is a disc-shaped structure, and the center of the base 25 is provided with a plurality of fixing holes for connecting with the support 28. Optionally, the fixing holes are Threaded hole. The supporting member 28 is a square thin plate structure, and the supporting member 28 is provided with a plurality of connection holes, the number and positions of the connecting holes correspond to the number and positions of the fixing holes on the base 25, so that...

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Abstract

The invention discloses a driving assembly and a flexible precise positioning platform and relates to the technical field of flexible precision positioning platforms. The driving assembly comprises a first piezoelectric driver and a flexible driving body; and the flexible driving body comprises a half-bridge type driving part, a first flexile hinge piece and a fixing platform. The fixing platform and the half-bridge type driving part are located on the two sides of the first flexible hinge piece correspondingly and are fixedly connected with the first flexible hinge piece; and the first piezoelectric driver is fixedly connected with the half-bridge type driving part. The flexible precise positioning platform comprises a vertical driving assembly, a supporting piece and a driving assembly; and the vertical driving assembly is perpendicular to the driving assembly. The flexible precise positioning platform has five decoupling freedom degrees, can achieve flat movement along the X axis, the Y axis and the Z axis and deflecting rotation around the X axis and the Y axis, and has the beneficial effects of achieving high precision, large travel, high rigidity and the like.

Description

technical field [0001] The invention relates to the technical field of flexible precision positioning platforms, in particular to a drive assembly and a flexible precision positioning platform. Background technique [0002] In recent years, with the rapid development of related technologies in the micro-nano field, especially cutting-edge fields such as aerospace engineering, precision mechanical engineering, biomedical engineering, and compound axis precision tracking, there is an urgent need for high-precision, high-resolution, large-stroke, and multiple degrees of freedom. precise positioning technology. The micro / nano-scale space precision positioning table can provide multi-degree-of-freedom nano-scale movement in three-dimensional space, and is an essential key instrument and equipment in the field of nanoscience. [0003] At present, the micro-nano positioning platform driven by piezoelectric ceramics has the defect of small stroke. The maximum stroke of the piezoele...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 王耿王海涛赵彦如王莹王帅旗周克辛
Owner HENAN POLYTECHNIC UNIV
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