Semiconductor device with stacked layout
A technology for semiconductors and devices, applied in the field of semiconductor devices, can solve problems such as increasing difficulty, and achieve the effects of simplifying electrical connections and simplifying channel doping
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[0059] Detailed embodiments of the inventive concept will now be described with reference to the drawings. However, the inventive concept can be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein; on the contrary, these embodiments are provided as examples, so that the present disclosure will be Those skilled in the art convey the scope of the inventive concept.
[0060] The scalability of thin-body devices (eg, fin transistors at the 5nm node and beyond) continues to challenge maintaining acceptable performance parameters such as sub-threshold slope (SS) and short channel effect (SCE). The gate fully enclosed (GAA) nanowire transistor (LFET) can provide superior control of the gate on a fully depleted channel, and allows the gate length to be further adjusted by the nanowire (NW) with a diameter of 4-7nm Scaled to 15nm. However, in conventional 2D layouts, gate length, sidewall spacers, and source / drain contacts co...
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