Vacuum sputtering coating device
A coating device and a technology of vacuum sputtering, applied in sputtering coating, vacuum evaporation coating, ion implantation coating and other directions, can solve the problem of overheating deformation of plastic film, low thermal conversion efficiency of heating device, incomplete crystallization of metal coating, etc. problem, to avoid overheating and deformation
Inactive Publication Date: 2017-12-29
SUZHOU NOYOPTO TECH
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Problems solved by technology
The heat conversion efficiency of the above-mentioned heating device is low, and the plastic film is also heated while heating the metal coating, which easily leads to overheating and deformation of the plastic film
In order to prevent the plastic film from overheating and deformation, the heating temperature can only be lowered, but this will easily lead to incomplete crystallization of the metal coating.
Method used
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[0014] The present invention will be described in detail below with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and structural, method, or functional changes made by those skilled in the art according to these embodiments are all included in the protection scope of the present invention.
[0015] An embodiment of the present invention is provided below:
[0016] See figure 1 , a vacuum sputtering coating device, comprising an outer shell 1, a vacuum cavity 11 is formed in the outer shell 1, and an unwinding roller 2 and a winding roller 3 are arranged in the vacuum cavity 11, and the unwinding roller 2 A main roller 4 and a sputtering cathode 5 opposite to the main roller 4 are arranged between the winding roller 3 and the rewinding roller 3;
[0017] A first guide roller 61 is arranged between the unwinding roller 2 and the main roller 4, and a second guide roller 62 and a third gui...
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The invention discloses a vacuum sputtering coating device. The vacuum sputtering coating device comprises a housing. A vacuum cavity is formed in the housing, an unreeling roller and a reeling roller are arranged in the vacuum cavity, and a primary roller and a sputtering cathode which is arranged opposite to a primary roller are arranged between the unreeling roller and the reeling roller; a first guide film is arranged between the unreeling roller and the primary roller, and a second guide roller and a third guide roller are arranged between the primary roller and the unreeling roller; the vacuum sputtering coating device also comprises a planar electromagnetic plate which is arranged between the primary roller and the reeling roller to heat a metal coating. The metal coating in a non-crystal state generates eddies to heat internally so as to accelerate crystallization of the metal coating by means of a high frequency alternating magnetic field generated by the planar electromagnetic plate. As the metal coating heats autologously and is relatively thin and heat is little, a plastic film can be prevented from being overheated to deform, and meanwhile, the metal coating is fully crystallized.
Description
technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a vacuum sputtering coating device. Background technique [0002] Vacuum sputtering coating is an existing coating process, which uses vacuum sputtering to make the atoms or molecules separated from the target adhere to the substrate to form a coating. [0003] When the prepared coating product uses a plastic film as a base material and a metal as a target material, the metal coating layer attached to the plastic film by vacuum sputtering is in an amorphous state. In order to crystallize the metal coating, in the prior art, heating devices such as infrared heaters and resistance heaters are used to heat the coated products. The above heating device has low heat conversion efficiency, and also heats the plastic film while heating the metal coating, which is likely to cause overheating deformation of the plastic film. In order to prevent the plastic film from being overhea...
Claims
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Login to View More IPC IPC(8): C23C14/20C23C14/56C23C14/58
CPCC23C14/205C23C14/562C23C14/5806
Inventor 王振东何万能
Owner SUZHOU NOYOPTO TECH