Wide-bandgap semiconductor lateral double-diffused field effect transistor with transverse and longitudinal electric field simultaneous optimization function
A lateral double diffusion, semiconductor technology, applied in the direction of semiconductor devices, circuits, electrical components, etc., can solve the problem of limited effect of lateral electric field optimization
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[0041] Such as figure 1 , figure 2 and image 3 Shown is a horizontal double-diffused transistor with horizontal and vertical electric fields and optimized wide bandgap semiconductor:
[0042] Wide bandgap semiconductor material substrate 1, the typical value of doping concentration is 1×10 13 cm -3 ~1×10 15 cm -3 ;
[0043] The base region 2 and the drift region 5 located on the surface of the substrate;
[0044] a source region 3 located on the surface of the base region;
[0045] a drain region 4 located on the surface of the drift region;
[0046] Under the drift region at the drain end are vertical auxiliary depletion substrate buried layers 6 and 7;
[0047] A portion of the charge compensation buried substrate 8, 9 is provided in the substrate region below the drift region and close to the auxiliary depleted buried substrate.
[0048] The vertical assisted depletion substrate buried layer can be N-type uniformly doped silicon material, P uniformly doped silicon...
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