A wide-bandgap semiconductor lateral double-diffused transistor with multi-ring electric field modulation substrate
A lateral double-diffusion, semiconductor technology, used in semiconductor devices, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as device breakdown voltage limited vertical withstand voltage capability, etc., to optimize the surface lateral electric field and body longitudinal electric field, The effect of increasing the breakdown voltage
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[0038] Such as figure 1 and figure 2 A wide-bandgap semiconductor lateral double-diffused transistor with a multi-ring electric-field-modulated substrate is shown:
[0039] Wide bandgap semiconductor material substrate 1, the doping concentration is the concentration of general wide bandgap semiconductor single crystal material, the typical value is 1×10 13 cm -3 ~1×10 15 cm -3 ;
[0040] The base region 2 and the drift region 5 located on the surface of the wide bandgap semiconductor substrate;
[0041] a source region 3 located on the surface of the base region;
[0042] The drain region 4 located on the surface of the drift region;
[0043] A multi-ring electric field modulation structure located under the drift region;
[0044] The rings 6, 7, 8 and 9 of the multi-ring electric field modulation structure can be N-type and P-type doped silicon materials, and the typical doping concentration reaches 1×10 14 cm -3 ~1×10 16 cm -3 ;
[0045] Each ring 6, 7, 8 and ...
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