Mask device and mask module and mask plate thereof

Abstract

The invention relates to a mask device and a mask module and a mask plate thereof. The mask device comprises the mask module and a mask frame; the mask module comprises the mask plate and a shieldingpiece; the edge of the mask plate is connected with the mask frame; multiple through holes are uniformly formed in the mask plate; multiple through ports are formed in the shielding piece; the shielding piece butts against the mask plate; each through port is aligned to part of the through holes in the mask plate; and the shielding piece shields the rest part of the through holes in the mask plate. The mask plate has no need to arrange different reserved areas according to different display areas, and only needs overall etching, so that the etching procedures are reduced, and the process complexity is reduced; the through holes are uniformly formed in the whole mask plate, so that the mechanical performances of all parts of the mask plate tend to be consistent, and the deformation is effectively reduced; and the display areas with different shapes can be evaporated at the same time, so that the utilization rate of a glass substrate is increased, the evaporation efficiency is improved,and the product updating demands can be quickly adapted to.

Description

technical field [0001] The invention relates to the technical field of organic light-emitting display manufacturing, in particular to a mask device, a mask component, and a mask plate. Background technique [0002] In the AMOLED (Active-matrix organic light emitting diode, active matrix organic light emitting diode) production process, the process that most affects the yield is the evaporation process. The basic process of the evaporation process is to heat the organic material to evaporate the organic material. And the through hole etched through the high-precision fine mask plate is evaporated on the glass substrate to form a light-emitting unit. In the evaporation process, the evaporated organic material is evaporated onto the substrate through the through hole in the active area of ​​the mask to form the AA (Active Area, effective display area) area of ​​the display screen. The AA area is also called the display area, that is, The active area of ​​the mask corresponds t...

AI Technical Summary

Problems solved by technology

[0004] 1: Since the mask plate is in the form of a single strip, when making the mask plate, it is usually necessary to etch the effective area of ​​the mask plate, and partially etch the Dummy (reserved area) of different shapes around the effective area to ensure the mask Under the influence of the tension force of the template, the mechanical properties of the effective area and the reserved area are as consistent as possible to reduce deformation; however, the manufacturing process of such a single mask plate is relatively complicated, and usually requires multiple exposures to etch out the effective area respectively. Etched holes and etched holes in reserved areas;

[0005] 2: The mask plate usually needs to be designed according to the specific product model, and then etched and manufactured. Since the mask plate manufacturing cycle is usually relatively long, and the product model of the display screen is updated quickly, this method cannot quickly respond to the market product demand;

[0006] 3: Due to the welding form of a single mask plate, the layout of the final substrate can only correspond to a certain product model, and the vacant position in the layout cannot be reasonably used, which makes the utilization rate of the layout of the glass substrate low, resulting in high production costs.

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