Rotary output double-mass-block tuning fork angular rate gyroscope

An angular rate gyro and dual-mass technology, which is applied to gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve problems such as the difficulty of vertical torsion bar processing, and achieve suppression of interference modes and reduction Capacitance change, effect of reducing influence

Pending Publication Date: 2018-02-13
NANJING UNIV OF SCI & TECH
View PDF4 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the bulk silicon process, it is qui

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Rotary output double-mass-block tuning fork angular rate gyroscope
  • Rotary output double-mass-block tuning fork angular rate gyroscope
  • Rotary output double-mass-block tuning fork angular rate gyroscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0016] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0017] combine Figure 1 to Figure 2 , a dual-mass tuning fork angular rate gyroscope with rotational output, used to measure the angular rate in the Z-axis direction. It includes an upper vacuum packaging cover plate, a lower silicon substrate and a middle single crystal silicon chip, and a gyro mechanical structure is arranged on the middle layer single crystal silicon chip. The present invention adopts wafer-level vacuum encapsulation technology, the upper vacuum encapsulation cover plate, the middle single crystal silicon wafer and the lower silicon substrate are made of silicon material, and a closed vacuum cavity is formed between the upper vacuum encapsulation cover plate and the lower silicon substrate , the middle single crystal silicon wafer is arranged in the vacuum cavity, so that the mechanical structure of the gyroscope is suspended above the l...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a rotary output double-mass block tuning fork angular rate gyroscope which comprises an upper layer vacuum encapsulation cover plate, a lower layer silicon substrate and a middle layer monocrystalline silicon wafer, wherein a gyro mechanical structure is arranged on the middle layer monocrystalline silicon wafer; two substructures of the gyro mechanical structure are bilaterally and symmetrically distributed on the two sides of middle support straight beams of cross beams and a drive capacitor and connected with the cross beams; the cross beam is anchored to the upper layer vacuum encapsulation cover plate and the lower layer silicon substrate via the middle support straight beams and end part folding beams; a part of a mechanical structure of a middle layer is overhung between the upper layer encapsulation cover plate and the lower layer silicon substrate. The gyroscope achieves rotary mode output, and reduces kinematic coupling between a drive mode and a detection mode and change of the drive capacitor during operation; the performance stability of the gyroscope is improved; high order mode frequency is above twice of working mode frequency; effective modeisolation is achieved; the gyroscope has higher vibrating disturbance resistance.

Description

technical field [0001] The invention belongs to the micro-electromechanical system and micro-inertia measurement technology, in particular to a dual-mass tuning fork angular rate gyroscope with rotational output. Background technique [0002] Micromachined inertial instruments include micromachined gyroscopes (MMG) and micromachined accelerometers (MMA). The use of microelectronic processing technology allows the complete integration of micromechanical structures and required electronic circuits on a silicon chip, thereby achieving a high degree of unity in terms of performance, price, volume, weight, and reliability. Therefore, this type of instrument has a series of advantages (such as small size, light weight, cheap price, high reliability, mass production, etc.), and has broad application prospects in both military and civilian fields. In civilian use, it is mainly used in the automotive industry, industrial monitoring and consumer products and robotics, such as airbags...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01C19/5621G01C19/5614
CPCG01C19/5614G01C19/5621
Inventor 杨海波苏岩朱欣华
Owner NANJING UNIV OF SCI & TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap