Mask frame and vapor deposition system
A mask plate and frame technology, which is applied in the field of mask plate frame and evaporation system, can solve the problems of large size and thin thickness of evaporation patterns, and achieve the effect of avoiding the decline of product yield
Pending Publication Date: 2018-02-23
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0005] In order to solve the problem in the prior art that the size of the evaporation pattern in the poorly bonded area between the metal mask and the substrate to be evaporated is larger than the normal pixel, and the thickness is thinner than the normal thickness, the embodiment of the present invention provides a mask frame and evaporation system
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[0032] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0033] In order to facilitate the description later, the following will be combined with the attached Figure 1-Figure 3 The application scenario of the mask plate carrier provided by the embodiment of the present invention is described:
[0034] figure 1 is a structural schematic diagram of an evaporation system, see figure 1 , when performing organic vapor deposition, the mask stage 1 is arranged in the evaporation chamber, and the mask frame 21 and the mask 22 are arranged on the mask stage 1 . Wherein, the outer contour of the mask carrier 1 is columnar or platform-shaped, and a first through hole 10 is provided in the middle of the mask carrier 1 , and the first through hole 10 penetrates the upper and lower surfaces of the mask...
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The invention discloses a mask frame and a vapor deposition system, and belongs to the field of vapor deposition processes. The mask frame comprises a first support arm and a second support arm whichare arranged in parallel at intervals, wherein the first support arm and the second support arm are provided with a fixed contact plane for fixing a mask respectively; a first side edge of the fixed contact plane of the first support arm close to the second support arm is parallel to a second side edge of the fixed contact plane of the second support arm close to the the first support arm, and thedirection which is in the same plane and perpendicular to the first side edge and the second side edge is a first direction; and the mask comprises a pattern region and a non-pattern region, and a vertical distance between the first side edge and the second side edge is greater than the length of the pattern region of the mask in the first direction.
Description
technical field [0001] The invention relates to the field of evaporation technology, in particular to a mask plate frame and an evaporation system. Background technique [0002] At present, the organic light emitting diode (English Organic Light Emitting Diode, referred to as OLED) organic evaporation coating technology usually uses a high-precision metal mask as a mold, heats the organic material to make it evaporate at high temperature, and then penetrates the metal in the molecular state of the material. The openings of the mask are evaporated onto the substrate. [0003] Wherein, openings are arranged on the metal mask, and the metal mask is welded on the frame. When evaporating, set the frame on a hollow carrier, place the substrate to be evaporated on the metal mask, and then set a magnetic partition on the substrate to be evaporated to absorb the metal mask. Make it stick to the substrate to be evaporated, and then conduct evaporation. [0004] Wherein, the metal m...
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Login to View More IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 林治明黄俊杰李冬伟王震张健
Owner BOE TECH GRP CO LTD