Superjunction device and method of manufacturing the same
A super-junction device, N-type technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problem of not being able to improve the reverse recovery softness factor of the body diode of the device
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[0083] Embodiment 1 of the present invention super junction device:
[0084] Such as image 3 Shown is a schematic diagram of a super junction device in Embodiment 1 of the present invention; in Embodiment 1 of the present invention:
[0085] The charge flow region includes a super junction structure composed of a plurality of alternately arranged N-type pillars 3 and P-type pillars; each of the N-type pillars 3 and its adjacent P-type pillars form a super-junction unit.
[0086] The super junction structure is formed on an N-type epitaxial layer, and an N-type buffer layer 30 composed of an N-type epitaxial layer is formed at the bottom of the super-junction structure, and the bottom of the N-type buffer layer 30 is heavily doped N-type semiconductor substrate 1.
[0087] There is an N-type electric field blocking layer 31 in the P-type column of at least one super junction unit, image 3 It is shown in that all the P-type pillars include an N-type electric field blocking ...
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