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50results about How to "Guaranteed breakdown voltage" patented technology

Fast recovery diode chip of low-concentration doped emitter region and manufacturing method thereof

ActiveCN103579367AExcellent electrical characteristic parametersThe concentration of holes at the junction decreasesSemiconductor/solid-state device manufacturingSemiconductor devicesVoltage dropP type doping
The invention relates to a power device and a manufacturing method of the power device, in particular to a fast recovery diode chip of a low-concentration doped emitter region and a manufacturing method of the fast recovery diode chip of the low-concentration doped emitter region. The fast recovery diode chip of the low-concentration doped emitter region comprises a metal cathode, a metal anode, a P-type doped layer, an N-type doped layer, an N-type substrate arranged between the P-type doped layer and the N-type doped layer, field oxide layers and passivation protective layer structures, wherein the metal anode is a low-concentration P-type doped region, the metal cathode is a low-concentration N-type buffer doped region and a low-concentration N-type reinforced doped region, the special manufacturing mode of injection doped of the reverse side is formed through an obverse side protection technology, and a device structure is formed through the special manufacturing mode of injection doped of the reverse side. According to the fast recovery diode chip of the low-concentration doped emitter region and the manufacturing method of the fast recovery diode chip of the low-concentration doped emitter region, due to the fact that the doped concentration of an anode emitter region and the doped concentration of a cathode emitter region are reduced, the self-key electric potential difference of a PN-junction is reduced, the total number of injection holes of the P-type doped region is reduced, performance of a fast recovery diode is integrally optimized, it is ensured that the fast recovery diode has low forward communication voltage drop, and the dynamic performance of a device is improved.
Owner:STATE GRID CORP OF CHINA +2

Super junction device and manufacturing method thereof

The present invention discloses a super junction device. P-type columns of at least one super junction unit are internally provided with N-type electric field barrier layers, and the N-type electric field barrier layers are configured to segment the P-type columns into first and second P-type columns which are respectively located at the top portions and the bottom portions of the electric field barrier layers; the N-type electric field barrier layers are configured to realize segmentation exhaustion of super junction structures at a top portion and a bottom portion; when a source-drain voltage of a super junction device is smaller than or equal to a first voltage value, the super junction structure at the top portion is only exhausted; and when the source-drain voltage of the super junction device is larger than the first voltage value, the super junction structures at the top portion and the bottom portion are exhausted. The present invention further discloses a manufacturing methodof a super junction device. According to the invention, a gate-drain capacitance and the minimum value of the gate-drain capacitance can be improved to effectively reduce the electromagnetic interference performance of the device in an application circuit and effectively reduce current and voltage overshoot caused by the device in the application circuit, reversely recovered soft factors of the device can be increased, and a breakdown voltage of the device can be maintained.
Owner:SHENZHEN SANRISE TECH CO LTD

N-type LDMOS device and technical method thereof

The invention discloses an N-type LDMOS device and a technical method thereof. According to the device, a low resistance substrate is provided with an N-type buried layer thereon. The N-type buried layer is provided with an N-type epitaxy thereon. The N-type epitaxy is provided with a P-well and a drift region therein. The drift region is also provided with an N-well and an STI structure therein. The P-well is also provided with a source region of the LDMOS device therein. The N-well of the drift region is provided with a drain region of the LDMOS device therein. The P-well is also provided with a heavily doped P-type region therein so as to draw forth the P-well. The surface of the N-type epitaxy is provided with a gate oxide layer and a polycrystalline silicon gate of the LDMOS device, and the two sides of the polycrystalline silicon gate are side walls. The bottom portion of the STI structure in the drift region is provided with heavily doped polycrystalline silicon. The P-type doped polycrystalline silicon layer is added to the bottom portion of the STI structure in the drift region, a P-type auxiliary exhaustion region is formed above the drift region, and a surface electric field intensity is lowered, which enable the LDMOS device to have a lower on-resistance and at the same time a higher breakdown voltage. The invention also discloses a technical method of the N-type LDMOS device.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

High-Early-voltage lateral transistor structure and preparation method thereof

The invention discloses a high-Early-voltage lateral transistor structure and a preparation method thereof. The lateral PNP transistor is formed by performing selective P-type impurity doping on an N-type epitaxial layer, that is, an emitter region of the PNP transistor is formed by a P-type doped region, a collector region of the PNP transistor is formed by a complete or partial annular P-type doped region outside the emitter region, and an N-type doped epitaxial layer is arranged between the two P-type doped regions to form a base region of the PNP transistor, so that a lateral P-N-P structure is formed, and the lateral PNP transistor is formed. Different from the traditional PNP transistor, the P-type collector region of the lateral PNP transistor with the novel structure is independently doped, the impurity concentration of the P-type collector region is lower than that of the N-type base region, when the CE voltage of the PNP transistor is increased, a CB junction space charge region is mainly expanded to the P-type collector region because the concentration of the P-type collector region of the lateral PNP transistor is lower than that of the N-type collector region, and thewidth change of the base region caused by the increase of the CE voltage is inhibited, so that a relatively high Early voltage is obtained.
Owner:XIAN MICROELECTRONICS TECH INST

Super junction device

The invention discloses a super junction device. A charge flow region comprises a first super junction structure formed by alternately arranging first P-type columns and first N-type columns. In the width direction of the first P-type columns, the first P-type columns and the first N-type columns continue to be alternately arranged and enter the first terminal area. In the length direction of the first P-type columns, the first P-type columns and the first N-type columns of the charge flow region directly extend into a partial region, namely a straight strip-shaped region, of the second terminal region, and a region shaped like a Chinese character 'hui' is arranged on the outer side of the straight strip-shaped region. And the width of the straight strip-shaped region is set according to the widening width of the depletion region in the second terminal region when the super junction device is withstand voltage. And a second super junction structure formed by alternately arranging second P-type columns and second N-type columns is arranged in the rectangular-ambulatory-plane region. According to the invention, the advantages of the full-straight-strip-shaped super junction structure and the homocentric-square-shaped super junction structure can be compatible and the defects of the two super junction structures can be overcome, so that the breakdown voltage of the device can be improved and the problem of unstable test of the device can be solved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Fast recovery diode chip with low-concentration doped emitter region and its manufacturing method

ActiveCN103579367BExcellent electrical characteristic parametersIncreased hole concentration at the junctionSemiconductor/solid-state device manufacturingSemiconductor devicesVoltage dropP type doping
The invention relates to a power device and a manufacturing method of the power device, in particular to a fast recovery diode chip of a low-concentration doped emitter region and a manufacturing method of the fast recovery diode chip of the low-concentration doped emitter region. The fast recovery diode chip of the low-concentration doped emitter region comprises a metal cathode, a metal anode, a P-type doped layer, an N-type doped layer, an N-type substrate arranged between the P-type doped layer and the N-type doped layer, field oxide layers and passivation protective layer structures, wherein the metal anode is a low-concentration P-type doped region, the metal cathode is a low-concentration N-type buffer doped region and a low-concentration N-type reinforced doped region, the special manufacturing mode of injection doped of the reverse side is formed through an obverse side protection technology, and a device structure is formed through the special manufacturing mode of injection doped of the reverse side. According to the fast recovery diode chip of the low-concentration doped emitter region and the manufacturing method of the fast recovery diode chip of the low-concentration doped emitter region, due to the fact that the doped concentration of an anode emitter region and the doped concentration of a cathode emitter region are reduced, the self-key electric potential difference of a PN-junction is reduced, the total number of injection holes of the P-type doped region is reduced, performance of a fast recovery diode is integrally optimized, it is ensured that the fast recovery diode has low forward communication voltage drop, and the dynamic performance of a device is improved.
Owner:STATE GRID CORP OF CHINA +2

Trench type power semiconductor device and manufacturing method thereof

The invention discloses a trench type power semiconductor device and a manufacturing method thereof, and relates to a power semiconductor device. In order to solve the problems that the manufacturingcost of a device is increased and the parasitic gate capacitance is increased due to the presence of a gate bus, the invention provides the following technical scheme: a gate contact hole is formed inan interlayer dielectric layer above the initial section of a trench, the gate conductive material in the trench is connected with the gate electrode metal layer above the gate conductive material through the gate contact hole, the width of the gate contact hole is smaller than that of the initial section of the trench, and the width of the initial section of the trench is larger than that of theextension section of the trench. The beneficial effects of the invention are that: according to the trench type power semiconductor device, stable and reliable grid connection can be realized on thebasis of not causing negative influence on the performance of the device; and by omitting a gate bus board, the photoetching process steps of the device are reduced, and the manufacturing cost of thedevice is reduced; and meanwhile, the gate parasitic capacitance introduced by the gate bus board is reduced, and the switching speed of the device is improved.
Owner:安建科技(深圳)有限公司

CMOS device in BCD process and manufacturing method thereof

The invention discloses a CMOS device in a BCD process. The CMOS device comprises a first MOS transistor with a channel conduction type of a first conduction type, and an LDMOS device comprises a first LDMOS with a channel conduction type of a second conduction type; a second conduction type doped first doped region is formed in a second conduction type first well region on the source region sideof the first MOS transistor, and the first doped region also forms a drift region of the first LDMOS. A first lightly doped drain region doped with the first conductivity type is formed in the first well region on the drain region side of the first MOS transistor. The first source region and the first drain region are formed on the surfaces of the first doped region and the first lightly doped drain region on the two sides of the first gate structure respectively. The invention further discloses a manufacturing method of the CMOS device in the BCD process. According to the invention, the high-voltage CMOS device can be realized, the short-channel effect of the device can be delayed, and the breakdown voltage of the device can be ensured without adding an additional process, so the size ofthe device can be further reduced, the conduction current is improved, and the conduction resistance is reduced.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Split gate power MOSFET device with highly doped layer and preparation method thereof

The invention relates to a split gate power MOSFET device with a highly doped layer and a preparation method thereof, belongs to the field of semiconductor devices, and solves the problem that the on-state resistance of the device cannot be further reduced while the breakdown voltage is improved in the prior art. An MOSFET device conduction region comprises a plurality of primitive cells arrangedperiodically, and each primitive cell comprises a trench, a shielding electrode and a trench gate electrode. The trench is arranged in an epitaxial layer of the semiconductor substrate, the shieldingelectrode is arranged in the trench, and the trench gate electrode is arranged at the top of the trench. The shielding electrode and the trench gate electrode are both made of second conductive type materials, the epitaxial layer is made of a first conductive type material and comprises a first epitaxial layer, a second epitaxial layer and a third epitaxial layer which are sequentially stacked onthe semiconductor substrate and have the same doping type, and the doping concentration of the first epitaxial layer and the doping concentration of the third epitaxial layer are the same and are lower than the doping concentration of the second epitaxial layer. According to the MOSFET device, the on-resistance of the device is further reduced while the breakdown voltage is improved, and the FOM value of the device is improved.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

A Vertical Double Diffused Metal Oxide Semiconductor Field Effect Transistor

The invention discloses a vertical double diffused metallic oxide semiconductor field effect transistor. The vertical double diffused metallic oxide semiconductor field effect transistor comprises a substrate, a P well region, an N well region, gate oxide layers and grid electrodes, wherein the grid electrodes comprise a first grid electrode and a second grid electrode; the second grid electrode is positioned between the first grid electrode and the substrate; the thickness of the gate oxide layer between the first grid electrode and the second grid electrode is a first thickness; the thickness of the gate oxide layer between the second grid electrode and the substrate is a second thickness; and the second grid electrode is connected with a refresh structure through a switch so that the second grid electrode can be refreshed to an initial potential. The transistor provided by the invention solves the technical problem that a threshold voltage drift failure easily occurs due to the fact that a VDMOS in the prior art needs the gate oxide layers with relatively high thicknesses to meet voltage requirements but the relatively thick gate oxide layers can accelerate the drift of threshold voltage when the device is subjected to radiation. The technical effects of slowing down the threshold voltage drift and improving the reliability are reached.
Owner:北京中科微投资管理有限责任公司
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