Fast recovery diode chip of low-concentration doped emitter region and manufacturing method thereof

Abstract

The invention relates to a power device and a manufacturing method of the power device, in particular to a fast recovery diode chip of a low-concentration doped emitter region and a manufacturing method of the fast recovery diode chip of the low-concentration doped emitter region. The fast recovery diode chip of the low-concentration doped emitter region comprises a metal cathode, a metal anode, a P-type doped layer, an N-type doped layer, an N-type substrate arranged between the P-type doped layer and the N-type doped layer, field oxide layers and passivation protective layer structures, wherein the metal anode is a low-concentration P-type doped region, the metal cathode is a low-concentration N-type buffer doped region and a low-concentration N-type reinforced doped region, the special manufacturing mode of injection doped of the reverse side is formed through an obverse side protection technology, and a device structure is formed through the special manufacturing mode of injection doped of the reverse side. According to the fast recovery diode chip of the low-concentration doped emitter region and the manufacturing method of the fast recovery diode chip of the low-concentration doped emitter region, due to the fact that the doped concentration of an anode emitter region and the doped concentration of a cathode emitter region are reduced, the self-key electric potential difference of a PN-junction is reduced, the total number of injection holes of the P-type doped region is reduced, performance of a fast recovery diode is integrally optimized, it is ensured that the fast recovery diode has low forward communication voltage drop, and the dynamic performance of a device is improved.

Description

Technical field [0001] The invention relates to a power device and a manufacturing method thereof, in particular to a fast recovery diode chip with a low concentration doped emitter region and a manufacturing method thereof. Background technique [0002] In high-end market areas such as power systems, locomotive traction, and new energy, fast recovery diodes are mostly used in freewheeling diodes of switching devices, which are used for matching use with insulated gate bipolar transistors of switching devices. It has the characteristics of reduced forward voltage, low loss of the device itself, and fast recovery speed. It is the future development direction of high voltage and high current. [0003] In order to pursue faster switching characteristics and better recovery softness, traditional high-power fast recovery diodes usually use life-controlled manufacturing and processing technology. The above-mentioned manufacturing technology has a complicated process flow and high manufac...

AI Technical Summary

Problems solved by technology

[0003] In order to pursue faster switching characteristics and better recovery softness, traditional high-power fast recovery diodes usually adopt life-

Images