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68results about How to "Raise the eigenfrequency" patented technology

Field-induced tunneling enhanced HEMT (high electron mobility transistor) device

InactiveCN102881716AGood positive characteristicsImprove pressure resistanceSemiconductor devicesSchottky barrierElectron
The invention belongs to the technical field of semiconductor devices, and particularly relates to a field-induced tunneling enhanced HEMT (high electron mobility transistor) device. The field-induced tunneling enhanced HEMT device is different from conventional AlGaN/GaN HEMT devices in that metal sources are in Schottky barrier contact instead of ohm contact in conventional structures; and metal gates are not positioned between the sources and drains but form insulating gate electrodes at the edges, away from the drains, of the sources through etching grooves. Field-control conductive channels are realized by means of the insulating layer and groove technology, field control of the field-control conductive channels is realized by voltage applied to the groove gate electrodes, and electrons subjected to band bending can directly tunnel barriers to be accumulated below the channels in gate modulation when forward voltage is applied to the gate electrodes, so that normally closed channels are realized, and frequency characteristics of the device can be promoted without affecting reverse voltage withstand capability of the device. Meanwhile, the preparation process of the device is compatible to traditional processes, and thereby solid foundation is established for the GaN power integration technology.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Super junction collector region SiGe heterojunction bipolar transistor

The invention discloses a super junction collector region SiGe heterojunction bipolar transistor. According to the transistor, a super junction collector region structure where n-type semiconductor columns and p-type semiconductor columns are alternately arrayed is adopted; a transverse electric field is introduced, collector region electric field distribution is improved, and then the breakdown voltage of the device is improved. According to a base region Ge component, the staircase distribution structure where gradual increase occurs from the side of an emitter junction to the side of a collector junction is adopted; a minority carrier acceleration electric field is introduced, the base region transit time is effectively shortened, and then the characteristic frequency of the device is improved. The current gain of the device and the temperature sensitivity of the characteristic frequency are improved, drift of a static working point of the device is effectively avoided, and stable work of the device is facilitated. Compared with a conventional power heterojunction bipolar transistor, the super junction collector region SiGe heterojunction bipolar transistor has the advantages that the transistor has the high breakdown voltage characteristic and the excellent frequency characteristic, the static working point of the device can not easily deviate during working and can not easily drift along with the change of the working temperature, and stable work of the device in the field of sub-terahertz power application can be achieved.
Owner:BEIJING UNIV OF TECH

Vertical type PNP triode in SiGe BiCMOS process and manufacturing method thereof

The invention discloses a vertical type PNP triode in a SiGe BiCMOS process and a manufacturing method thereof. The vertical type PNP triode comprises a collector region, an outer isolation region, a base region, and an emission region. The collector region is composed of first P type impurity regions and P type burying layers; the P type burying layers are formed at shallow groove field oxygen bottoms that are at two sides of an active area as well as are adjoined with the active area; deep hole contacts are formed at the tops of the P type burying layers so as to lead out collectors. The outer isolation region includes N type burying layers that formed at the shallow groove field oxygen bottoms that are at the two sides of the active area; and there are lateral separations between the N type burying layers and the P type burying layers. The base region comprises an intrinsic base region and an outer base region. The intrinsic base region is formed by an N type silicon epitaxial layer that is formed at the upper portion of the active area. The emission region is formed by a P type SiGe epitaxial layer and a polysilicon layer, wherein the P type SiGe epitaxial layer is formed on the intrinsic base region. In addition, the invention also discloses a manufacturing method of the vertical type PNP triode in the SiGe BiCMOS process. According to the invention, a characteristic frequency of the PNP triode can be improved; the PNP triode can be integrated into a current process; flexibilities of the PNP triode design can be improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Two-wire system built-in charge amplifying circuit based on field-effect tube

ActiveCN106788297ALarge dynamic response rangeInput dynamic range is wideCharge amplifiersCapacitanceLow noise
The invention relates to a two-wire system built-in charge amplifying circuit based on a field-effect tube and belongs to the technical field of low-noise two-wire system charge-voltage conversion amplifying circuit and structure design. According to the invention, at an input stage, the change in a small-signal voltage-controlled current of a field-effect tube is adopted for realizing the impedance conversion from a high internal resistance alternating charge signal to a low internal voltage signal; a biasing circuit is formed by resistance differential pressure; a signal passes by a common base current follower formed by a PNP bipolar transistor and a common emitter output circuit formed by a NPN bipolar transistor and then is compounded with a power supply, so that the two-wire system signal transmission can be formed; an input end filtering capacitor can realize the reduction of noise interference; and a signal voltage is compounded and overlapped with a direct current bias voltage. The field-effect tube is low in noise and the field-effect tube and the bipolar transistor are high in characteristic frequency, so that the circuit frequency response range is wide, and the output driving capacity is higher; few electron components are used, and the resistance elements are subjected to resistance slurry sintering and laser resistor trimming and are easy to integrate and control precision; and a circuit base plate is made from aluminum oxide ceramics, so that the structure strength is high.
Owner:SUZHOU CHANGFENG AVIATION ELECTRONICS

Ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor

The invention discloses a heterojunction bipolar transistor, and particularly relates to an ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor. According to the ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor, a stepped distribution structure that the number of base region Ge components gradually increases from an emitter junction side to a collector junction side is adopted, current gain of a device slows down along with the trend of temperature changes, and drifting of a quiescent operating point of the device can be prevented in a wide temperature area; meanwhile, the ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor can improve the characteristic frequency of the device and sensitivity of changes, along with the temperature, of the device. In addition, due to the fact that the non-equal finger separation distance symmetrical structure that indexes of the finger separation distances of emitter electrode fingers increase from the two sides of the device to the center of the device is further adopted by the ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor, the phenomenon that heat of emitter electrode fingers on the outer side flows into the center can be effectively prevented from happening, the purpose of reducing thermal coupling effect among emitter electrode fingers and the purpose of improving uniformity of distribution of the temperature of an active area of the device are achieved, and the purpose of improving the thermal stability of the ultra-wide temperature area high-thermal-stability microwave power SiGe heterojunction bipolar transistor is achieved.
Owner:BEIJING UNIV OF TECH

Silicon germanium heterojunction NPN (negative-positive-negative) triode and manufacture method

The invention discloses a silicon germanium heterojunction NPN (negative-positive-negative) triode. A collector region is formed in an active region, is connected with N-type pseudo buried layers formed at the bottoms of shallow trench field oxides on two sides of the active region and a collector electrode is guided out through deep-hole contact. The silicon germanium heterojunction NPN triode further comprises a collector region implantation window formed by etching silicon dioxide, P-type polycrystalline silicon and silicon nitride, a lateral wall indent structure is formed by horizontally etching the silicon dioxide, a P-type silicon germanium epitaxial layer is formed at the bottom of the window, the lateral wall indent structure and the P-type polycrystalline silicon contacting with the silicon germanium epitaxial layer serve as an intrinsic base region and outer base regions, inner spacers are formed on the inner side walls of the window, and an emitter region consists of N-type polycrystalline silicon which is filled into the window and extends out of the window from the top of the window. The invention further discloses a manufacture method for the silicon germanium heterojunction NPN triode. The silicon germanium heterojunction NPN triode has the advantages that use of photomasks can be decreased, cost can be reduced, the dimension of the triode can be reduced, parasitic resistance can be reduced and characteristic frequency can be improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Transverse SiGe heterojunction bipolar transistor with adjustable doping concentration

ActiveCN110556420AExtended microwave power operating rangeRaise the eigenfrequencySemiconductor devicesPower flowCondensed matter physics
The invention discloses a transverse SiGe heterojunction bipolar transistor with adjustable doping concentration. The transverse SiGe heterojunction bipolar transistor is an NPN type or PNP type transverse SiGe HBT (Heterojunction Bipolar Transistor). By applying a positive voltage to a substrate electrode below an emitter region and a base region of an NPN type device (or applying a negative voltage to a substrate electrode below an emitter region and a base region of a PNP type device), the doping concentration of the emitter region can be increased, the doping concentration of the base region can be reduced, and meanwhile, the current gain and the characteristic frequency can be improved. By applying a negative voltage to a substrate electrode below a collector region of the NPN type device (or applying a positive voltage to a substrate electrode below a collector region of the PNP type device), the doping concentration of the collector region can be reduced, and the breakdown voltage can be improved. Compared with a conventional transverse SiGe HBT, the doping concentrations of the three regions can be independently adjusted by changing the external voltages applied to the substrate electrodes below the emitter region, the base region and the collector region, so that the characteristic frequency, the current gain and the breakdown voltage are synchronously improved.
Owner:BEIJING UNIV OF TECH

Preparation method of miniature supercapacitor capable of being used for kHZ alternating current linear filtering

The invention discloses a preparation method of a miniature supercapacitor capable of being used for kHZ alternating current linear filtering. By the method, the problems that a traditional aluminum electrolytic capacitor is large in size and small in characteristic frequency are mainly solved. According to the implementation scheme, the method comprises the following steps of 1) making a patterned photoresist-target substrate on a target substrate through photoetching; 2) depositing a metal current collector on the patterned substrate by using an electron beam evaporation device to form a metal current collector / photoresist-target substrate structure, and cleaning the metal current collector / photoresist-target substrate structure by using a plasma oxygen device; 3) manufacturing an electrode material coating on the surface of the cleaned metal current collector and removing the photoresist to form an electrode material-metal current collector-target substrate structure; and 4) dispensing an electrolyte on the surface of an electrode material, leading out positive and negative electrode leads, and packaging with PDMS to complete the manufacturing of the miniature supercapacitor device. The manufactured device is small in size and electrode size, the characteristic frequency can reach kHz or above, and the preparation method can be used for manufacturing a miniature rectifying circuit.
Owner:XIDIAN UNIV

Linear actuator, hydraulic bearing, and motor vehicle with such a hydraulic bearing or linear actuator

The invention discloses a linear actuator, a hydraulic bearing, and a motor vehicle with such a hydraulic bearing or linear actuator. The invention relates to an electromagnetic linear actuator (16) with a stator (18) and an armature (20) which can be moved relative to the stator (18). The stator (18) has at least one permanent magnet (22) and at least one coil (24), the stator (18) has a conductive element (26) made of a ferromagnetic material, the conductive element (26) extends over the at least one permanent magnet (22) and/or the at least one coil (26), and the armature (18) forms a yoke (34) made of a ferromagnetic material in the longitudinal direction L for the conductive element (26). The invention further relates to a hydraulic bearing (2) with a support spring (36), a working chamber (4), which is filled with a hydraulic fluid, a compensating chamber (6), a partition (8) which is arranged between the working chamber (4) and the compensating chamber (6), a throttle channel (10) which is formed between the working chamber (4) and the compensating chamber (6) for exchanging hydraulic fluid, and a control membrane (12) which is paired with the partition (8) and which is designed to change a working chamber volume (14) of the working chamber (4). The hydraulic bearing (2) has an electromagnetic linear actuator (16) according to the invention, and the armature (20) is mechanically connected to the control membrane (12). The invention additionally relates to a motor vehicle with such a hydraulic bearing (2).
Owner:CONTITECH VIBRATION CONTROL

Si-ge heterojunction NPN (negative-positive-negative) triode device and manufacturing method thereof

The invention discloses a si-ge heterojuncition NPN (negative-positive-negative) triode device, which comprises a collector area, an N-type buried layer, a P-type si-ge epitaxial layer, an emitter window, an intrinsic base area, an outer base area and an emitting area, wherein the collector area is formed in an active area and connected with the N-type pseudo buried layers formed at the bottom of shallow trench field oxygen of two sides of the active area, a collector electrode is guided out through deep hole contact, the emitter window is formed by etching P-type silicon and silicon nitride which are formed on the P-type si-ge epitaxial layer, the intrinsic base area is formed by the P-type si-ge epitaxial layer at the bottom of the emitter window, the outer base area is formed by the P-type si-ge epitaxial layer outside the emitter window and the P-type silicon, an inner side wall is formed on the inner wall of the window, and the emitting area is formed by N-type polycrystalline filled in the emitter window and extending to the outside of the window from the top. The invention further discloses a manufacturing method of the si-ge heterojunction NPN triode device. The size of the si-ge heterojunction NPN triode device and parasitic resistance of the collector electrode can be reduced, characteristic frequency of the device can be increased, process procedures can be simplified, process cost can be reduced and accurate control of process size can be realized.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

High-precision piezoelectric sensor

The invention discloses a high-precision piezoelectric sensor. The high-precision piezoelectric sensor comprises a base, a first adhesive layer, a piezoelectric film layer, a second adhesive layer anda mass block, wherein the first adhesive layer, the piezoelectric film layer, the second adhesive layer and the mass block are arranged on the base in sequence; the mass block comprises a body, at least one protruding part located at the bottom of the body and at least one vacancy part adjacent to the protruding part; the protrusion part is in contact with the second adhesive layer, and the height of the vacancy part is larger than the thickness of the second adhesive layer. The piezoelectric film layer is laminated on the base through the first adhesive layer, and the mass block is stacked on the piezoelectric film layer through the second adhesive layer, so that the piezoelectric film layer, the first adhesive layer and the second adhesive layer are connected; a center column does not need to be arranged, the problem that the mass of a traditional compression type acceleration sensor is eccentric can be avoided, mechanical parts are reduced, and the resonance frequency and uniformity of the device are further adjusted. Furthermore, the vacancy part can be arranged at the bottom of the mass block, so that the precision of the device is improved by reducing the contact area between the mass block and the piezoelectric film layer and reducing the weight of the mass block.
Owner:佛山市卓膜科技有限公司
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