Preparation method of miniature supercapacitor capable of being used for kHZ alternating current linear filtering

A supercapacitor and linear filtering technology, applied in the manufacture of hybrid/electric double layer capacitors, hybrid capacitor electrodes, etc., can solve the problems of low energy devices that can only be used for energy storage, to enhance adhesion and reduce charge Transmission impedance, the effect of increasing the characteristic frequency
CN112951622AInactive Publication Date: 2021-06-11XIDIAN UNIV
4 Cites 2 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
XIDIAN UNIV
Publication Date
2021-06-11
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention discloses a preparation method of a miniature supercapacitor capable of being used for kHZ alternating current linear filtering. By the method, the problems that a traditional aluminum electrolytic capacitor is large in size and small in characteristic frequency are mainly solved. According to the implementation scheme, the method comprises the following steps of 1) making a patterned photoresist-target substrate on a target substrate through photoetching; 2) depositing a metal current collector on the patterned substrate by using an electron beam evaporation device to form a metal current collector / photoresist-target substrate structure, and cleaning the metal current collector / photoresist-target substrate structure by using a plasma oxygen device; 3) manufacturing an electrode material coating on the surface of the cleaned metal current collector and removing the photoresist to form an electrode material-metal current collector-target substrate structure; and 4) dispensing an electrolyte on the surface of an electrode material, leading out positive and negative electrode leads, and packaging with PDMS to complete the manufacturing of the miniature supercapacitor device. The manufactured device is small in size and electrode size, the characteristic frequency can reach kHz or above, and the preparation method can be used for manufacturing a miniature rectifying circuit.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention belongs to the technical field of semiconductor devices, and in particular relates to a preparation method of a miniature supercapacitor, which can be used for kHz AC linear filtering. Background technique

[0002] Obtaining energy from the external environment, such as converting thermal energy and mechanical energy in the external environment into electrical energy, has become the main way to solve the problem of future energy scarcity. As a flexible wearable electronic device, the nano triboelectric generator is an output device that converts mechanical energy into AC pulses. It requires a rectifier circuit at the back end to achieve DC output from AC signals to daily power usage. The commonly used frequency range of this pulsed AC signal is several to several kilohertz, so the rectification circuit for back-end matching needs to work normally within this frequency range. In order to meet the needs of the integration of flexible power...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More