Packaging method of UVLED ceramic base and structure of UVLED ceramic base
A ceramic base and packaging method technology, applied in electrical components, circuits, semiconductor devices, etc., can solve the problems of large warpage of the UVLED ceramic base, difficult to achieve product air-tight packaging, and high manufacturing costs, and achieve high stability. performance and reliability, good sealing, optimized warpage
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Embodiment 1
[0044] An aluminum nitride ceramic substrate 110 with a size of 114.3 mm×114.3 mm is selected for use after ultrasonic cleaning treatment (pretreatment) is performed on its surface. The metal paste is printed on the surface of the ceramic substrate 110 by printing to form the metal layer 120 , thereby obtaining a precursor of the ceramic metal backing plate 140 . Wherein, the metal layer 120 includes 20% Ag, 73% Cu and 7% Ti by mass percentage.
[0045] A package ceramic frame 130 is provided on the package connection portion 122 of the metal layer 120 .
[0046] In this embodiment, the package ceramic frame 130 is aluminum nitride ceramic. The package ceramic frame 130 is preprocessed. Specifically, the sealing ceramic frame 130 is cleaned by ultrasonic waves and dried. Then the pretreated aluminum nitride package ceramic frame 130 is attached to the package connection portion 122 of the metal layer 120 .
[0047] Finally, the precursor of the ceramic metal liner 140 and ...
Embodiment 2
[0049] The metal-removing layer 120 includes 10% Ag, 87% Cu and 3% Ti by mass percentage, and the others are the same as in Embodiment 1.
[0050] Thus, the UVLED ceramic base of the present invention was prepared, and then related tests were performed on it. The test results are shown in Table 1.
Embodiment 3
[0052] Except that the metal layer 120 includes 30% Ag, 65% Cu and 5% Ti by mass percentage, and the package frame and the ceramic substrate are made of alumina ceramics, the others are the same as the embodiment 1.
[0053] Thus, the UVLED ceramic base of the present invention was prepared, and then related tests were performed on it. The test results are shown in Table 1.
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