Chip-level rotation modulation mems silicon micromachined gyroscope

Abstract

The invention discloses a chip-level rotating-modulation MEMS (micro-electromechanical systems) silicon micromechanical gyro and belongs to the field of inertial technologies and MEMS. The chip-levelrotating-modulation MEMS silicon micromechanical gyro comprises a base to support a rotary platform and maintain its rotation and an SOI (silicon on insulator) wafer; the base is composed of glass sheet 1 and first metal electrode 2 and second metal electrode 3 arranged on the upper surface of the glass sheet by sputtering; a micromechanical gyro 4, a wire unit 5, a drive electrode 6, a driving detection electrode 7, a first sensitive detection electrode 8 and a second sensitive detection electrode 9 are formed on a device layer of the SOI silicon wafer; a rotary modulation platform is formedon a base layer. The micromechanical gyro and its rotary modulation platform are integrally formed on different layers of the same SOI wafer, the size of the rotary modulating gyro is greatly decreased, and integrity is improved; compared with original like gyros, the chip-level rotating-modulation MEMS silicon micromechanical gyro is formed into the chip-level rotary modulating micromechanical gyro with the size decreased by about 2 magnitudes.

Description

Technical field: [0001] The invention relates to a MEMS silicon micromechanical gyroscope, which is used for measuring the rotational angular rate of an object and acquiring the attitude information of the object, and belongs to the fields of inertial technology and micro-electromechanical systems (MEMS). Background technique: [0002] Silicon micromachined gyroscope is an inertial device used to measure the angular rate of rotation of objects. It has important applications in navigation guidance, platform stability control, automotive industry, consumer electronics and other fields. The output drift of the silicon micromachined gyroscope is the most important index affecting the attitude error of the inertial navigation system, and it takes a lot of time and cost to significantly reduce the drift of the silicon micromachined gyroscope. At present, using the rotating platform to modulate the gyro output drift is an effective and fast method to significantly reduce the attitu...

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the disadvantages of large volume and low integration of existing rotary modulation gyroscopes, the present invention proposes a chip-level rotary modulation silicon micromechanical gyroscope to realize the integrated structure chip of a micro rotary modulation platform and a silicon micromechanical gyroscope. Only a few cubic millimeters, with the characteristics of small size and high integration

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